ASME Digital Collection

Fig. 3

Effect of O2 plasma cleaning on the surface roughness and edge definition of WS2 features. (a)–(d) Optical-microscope images of monolayers obtained following various cleaning recipes performed in step 7 of Fig. 1. All scale bars are 100 μm. Images shown are after etching of the gold, as in step 8 of Fig. 1. (e)–(f) AFM topography scans of features in (a)–(d), respectively. “Sq” denotes the root-mean-square surface roughness of the scanned area. All AFM scans shown are of a 5-μm-square region.

Effect of O₂ plasma cleaning on the surface roughness and edge definition of WS₂ features. (a)–(d) Optical-microscope images of monolayers obtained following various cleaning recipes performed in step 7 of Fig. 1. All scale bars are 100 μm. Images shown are after etching of the gold, as in step 8 of Fig. 1. (e)–(f) AFM topography scans of features in (a)–(d), respectively. “Sq” denotes the root-mean-square surface roughness of the scanned area. All AFM scans shown are of a 5-μm-square region.

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