This paper describes head/disk interface dynamics for micromachined mother ship negative pressure slider bearings with an integrated microsuspension mechanism that we proposed, at steady-state flying in proximity magnetic recording. The authors first indicated the analytical model for air bearing dynamics of mother ship slider mechanisms, and the advantages of the mechanisms were discussed from the dynamics points of view, compared with conventional flying head slider mechanisms. Dynamic design considerations and optimization for micromachined mother ship negative pressure slider bearings with an integrated microsuspension mechanism were also investigated. Finite element simulation for the stiffness analysis of a microsuspension mechanism was carried out and the design optimization for low stiffness gimbals was studied. Furthermore, the effects of slider mass ratio and slider car film stiffness ratio of a secondary slider to a primary slider on mother shipslider dynamics were analyzed numerically. Considering those numerical simulationresults, system optimization for sliders as well as microsuspension gimbals was established to achieve head/disk interface reliability in high density proximity magnetic recording.

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