Hydrodynamic performance of gas microbearings, fabricated with deep X-ray lithography and electroplating, will be presented in this article. Static performance in terms of load parameters and attitude angles was calculated using Molecular Gas Lubrication (MGL) theory. Threshold speed and allowable rotor mass were calculated to investigate safe operating conditions of the fabricated gas microbearings using orbit simulation. Finally, improved bearing designs were proposed to increase stability.
Hydrodynamic Performance of Gas Microbearings
Contributed by the Tribology Division for publication in the ASME JOURNAL OF TRIBOLOGY. Manuscript received by the Tribology Division September 17, 2003; revised manuscript received April 24, 2004. Review conducted by: M. Fillon (Assoc. Ed.).
Kim , D., Lee , S., Bryant , M. D., and Ling, F. F. (November 9, 2004). "Hydrodynamic Performance of Gas Microbearings ." ASME. J. Tribol. October 2004; 126(4): 711–718. https://doi.org/10.1115/1.1792676
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