A complete database for Couette flow rate (QCD,α1,α2,0.1α1,α21.0,0.01D100, where D=inverse Knudsen number) for ultra-thin gas film lubrication problems is advanced. When the accommodation coefficients (AC) of the two lubricating surfaces are different α1α2, the Couette flow rate in the modified molecular gas film lubrication (MMGL) equation should be corrected. The linearized Boltzmann equation (under small Mach number conditions) is solved numerically for the case of non-symmetric molecular interactions α1α2. The Couette flow rate is then calculated, and the database is constructed. The present database can be easily implemented in the MMGL equation. In addition, the present database extends the previously published results for 0.1α1,α20.7. The database for low ACs is valuable in the analysis and applications of MEMS devices (bushings of electrostatic micro motors, micro bearings, magnetic head/disk interfaces, etc.), and their future development.

1.
Burgdorfer
,
A.
,
1959
, “
The Influence of the Molecular Mean Free Path on the Performance of Hydrodynamic Gas Lubricated Bearings
,”
ASME J. Basic Eng.
,
81
, pp.
94
100
.
2.
Hsia
,
Y.
, and
Domoto
,
G. A.
,
1983
, “
An Experimental Investigation of Molecular Rarefaction Effects in Gas-Lubricated Bearings at Ultra-Low Clearances
,”
ASME J. Lubr. Technol.
,
105
, pp.
120
130
.
3.
Mitsuya
,
Y.
,
1993
, “
Modified Reynolds Equation for Ultra-thin Film Gas Lubrication Using 1.5-order Slip-flow Model and Considering Surface Accommodation Coefficient
,”
ASME J. Tribol.
,
115
, pp.
289
294
.
4.
Fukui
,
S.
, and
Kaneko
,
R.
,
1988
, “
Analysis of Ultra-Thin Gas Film Lubrication Based on Linearized Boltzmann Equation: First Report-Derivation of a Generalized Lubrication Equation Including Thermal Creep Flow
,”
ASME J. Tribol.
,
110
, pp.
253
262
.
5.
Hwang
,
Chi-Chuan
,
Fung
,
Rong-Fong
,
Yang
,
Rong-Fuh
,
Weng
,
Cheng-I
, and
Li
,
Wang-Long
,
1996
, “
A New Modified Reynolds Equation for Ultra-Thin Film Gas Lubrication
,”
IEEE Trans. Magn.
,
32
, pp.
344
347
.
6.
Lord, R. G., 1976, “Tangential Momentum Accommodation Coefficients of Rare Gases on Polycrystalline Metal Surfaces,” in Rarefied Gas Dynamics, 10th Symposium, Plenum Press, New York, pp. 531–538.
7.
Veijola, T., Kuisma, H., and Lahdenpera¨, J., 1997, “Model for Gas Film Damping in a Silicon Accelerometer,” Circuit Theory Laboratory, CT-29, www.aplac.hut.fl.
8.
Fukui
,
S.
, and
Kaneko
,
R.
,
1987
, “
Analysis of Ultra-thin Gas Film Lubrication Based on the Linearized Boltzmann Equation
,”
JSME Int. J.
,
30
, pp.
1660
1666
.
9.
Fukui
,
S.
, and
Kaneko
,
R.
,
1990
, “
A Database for Interpolation of Poiseuille Flow Rates for High Knudsen Number Lubrication Problems
,”
ASME J. Tribol.
,
112
, pp.
78
83
.
10.
Li, Wang-Long, 2000, “Effects of Accommodation Coefficients and Non-Symmetric Molecular Interaction on Poiseuille Flow Rate of MEMS Devices,” Proceedings of the 24th National Conference on Mechanics, MEMS, E-004.
11.
Kang, S.-C., 1997, “A Kinetic Theory Description for Molecular Lubrication,” Ph.D. thesis, Carnegie Mellon University.
12.
Huang
,
W.
, and
Bogy
,
D. B.
,
2000
, “
The Effect of the Accommodation Coefficient on Slider Air Bearing Simulation
,”
ASME J. Tribol.
,
122
, pp.
427
435
.
13.
Bhatnagar
,
P. L.
,
Gross
,
E. P.
, and
Krook
,
M.
,
1954
, “
A Model for Collision Processes in Gases, I. Small Amplitude Processes in Charged and Neutral One-Component Systems
,”
Phys. Rev.
,
94
, pp.
511
525
.
14.
Press, W. H., Teukolsky, S. A., Vetterling, W. T., and Flannery, B. P., 1992, Numerical Recipes in Fortran, Cambridge University Press.
15.
Li
,
W. L.
,
1999
, “
Analytical Modelling for Ultra-Thin Gas Squeeze Film
,”
Nanotechnology
,
10
(
4
), pp.
440
446
.
16.
Pan
,
F.
,
Kubby
,
J.
,
Peeters
,
E.
,
Tran
,
A. T.
, and
Mukherjee
,
S.
,
1998
, “
Squeeze Film Damping Effect on the Dynamic Response of MEMS Torsion Mirror
,”
J. Micromech. Microeng.
,
8
, pp.
200
208
.
17.
Dhuler, V. R., Mehregany, M., Phillips, S. M., and Lang, J. H., 1992, “A Comparative Study of Bearing Designs and Operational Environments for Harmonic Side-Drive Micromotors,” Proc. IEEE Micro Electro Mechanical System Workshop (Travemunde, Germany, Feb. 1992), IEEE German Section, Published by IEEE, pp. 171–176.
18.
Maureau
,
J.
,
Sharatchandra
,
M. C.
,
Sen
,
M.
, and
Ga-el-Hak
,
M.
,
1997
, “
Flow and Load Characteristics of Microbearings With Slip
,”
J. Micromech. Microeng.
,
7
, pp.
55
64
.
You do not currently have access to this content.