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Keywords: chemical vapor deposition
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Journal Articles
Article Type: Research Papers
J. Thermal Sci. Eng. Appl. June 2023, 15(6): 061005.
Paper No: TSEA-22-1509
Published Online: April 3, 2023
... on the quality of the GaN thin films. The metal-organic chemical vapor deposition (MOCVD) process is a common manufacturing technique for fabricating high-quality thin films. By manipulating the operating conditions and the reactor design, one can control the deposition rate and the uniformity of the thin film...
Journal Articles