1-2 of 2
Keywords: chemical vapor deposition
Follow your search
Access your saved searches in your account

Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Journal Articles
Article Type: Research Papers
J. Thermal Sci. Eng. Appl. June 2023, 15(6): 061005.
Paper No: TSEA-22-1509
Published Online: April 3, 2023
... on the quality of the GaN thin films. The metal-organic chemical vapor deposition (MOCVD) process is a common manufacturing technique for fabricating high-quality thin films. By manipulating the operating conditions and the reactor design, one can control the deposition rate and the uniformity of the thin film...
Journal Articles