Topics: Dielectric liquids, Switches, Thermal resistance, Computer simulation, Design, Energy consumption, Manufacturing, Microelectromechanical systems, Silicon, Water

Topics: Evaporation, Flow (Dynamics), Heat transfer, Microchannels, Fluids, Latent heat, Energy budget (Physics), Heat, Heat conduction, Microphotography

Topics: Drops, Liquid metals, Manufacturing, Switches, Deformation, Stress, Contact resistance, Silicon, Thermal resistance

Topics: Heat engines, Microelectromechanical systems, Design, Electricity (Physics), Engineering prototypes, Engines, Generators, Manufacturing, Membranes, Photolithography

Topics: Mechanical behavior, Membranes, Micromachining, Deflection, Electricity (Physics), Electrodes, Energy conservation, Heat engines, Materials properties, Piezoelectric ceramics

Topics: Cycles, Heat engines, Microelectromechanical systems, Engines, Membranes, Pressure, Deflection, Fluids, Temperature, Cavities

Topics: Cantilevers, Energy conversion, Q-factor

Topics: Heat transfer, Microchannels, Membranes, Fluids, Silicon, Electricity (Physics), Energy budget (Physics), Evaporation, Heat, Microscopes

Topics: Actuators, Vapors, Membranes, Computer simulation, Deflection, Energy budget (Physics), Evaporation, Geometry, Heating, Materials properties

Topics: Heat transfer, Microchannels, Membranes, Fluids, Evaporation, Latent heat, Silicon, Thin films, Electricity (Physics), Epoxy adhesives

Topics: Heat engines, Microelectromechanical systems, Switches, Membranes, Engines, Heat, Silicon, Cooling, Cycles, Deflection

Topics: Microelectromechanical systems, Switches, Liquid metals, Drops, Thermal resistance, Carbon nanotubes, Design, Heating, Manufacturing, Silicon