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Proceedings Papers

Micro and Nanofabrication of GaN by Wet-Chemical-Assisted Femtosecond Laser Ablation

Seisuke Nakashima, Koji Sugioka, Katsumi Midorikawa
Proc. ASME. MNHMT2009, ASME 2009 Second International Conference on Micro/Nanoscale Heat and Mass Transfer, Volume 1, 705-712, December 18–21, 2009
Publisher: American Society of Mechanical Engineers
Paper No: MNHMT2009-18367
https://doi.org/10.1115/MNHMT2009-18367
View Paper titled, Micro and Nanofabrication of GaN by Wet-Chemical-Assisted Femtosecond Laser Ablation
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Topics: Gallium nitride, Laser ablation, Nanofabrication, Ablation (Vaporization technology), Lasers, Crystals, Laser beams, Lenses (Optics), Absorption, Etching