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Proceedings Papers

Numerical Analysis on the Development of the Large-Scale Showerhead for Depositing AlGaInN Films

Chulsoo Byun, Dae Hyeon Kim, Kang Woo Joo, Kwang-Sun Kim
Proc. ASME. IMECE2013, Volume 8A: Heat Transfer and Thermal Engineering, V08AT09A046, November 15–21, 2013
Paper No: IMECE2013-65515
https://doi.org/10.1115/IMECE2013-65515
View Paper titled, Numerical Analysis on the Development of the Large-Scale Showerhead for Depositing AlGaInN Films
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Topics: Chemical vapor deposition, Computational fluid dynamics, Economics , Gallium nitride, Gases, Manufacturing, Metalorganic chemical vapor deposition, Metals, Numerical analysis, Porous materials
Proceedings Papers

A Numerical Analysis of the Solar Panel Support Structure on the Weak Ground

Kang-Woo Joo, Jun Young Kim, Kyu Tae Park, Kwang-Sun Kim
Proc. ASME. IMECE2013, Volume 9: Mechanics of Solids, Structures and Fluids, V009T10A002, November 15–21, 2013
Paper No: IMECE2013-65549
https://doi.org/10.1115/IMECE2013-65549
View Paper titled, A Numerical Analysis of the Solar Panel Support Structure on the Weak Ground
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Topics: Numerical analysis, Solar energy, Renewable energy sources, Solar energy systems, Stress, Wind, Aerodynamics, Damage, Deformation, Developing nations
Proceedings Papers

A Study on the Internal Thermal Problems for Low Temperature Furnace in Semiconductor Processing

Kang-Woo Joo, Duwon Jeong, Mason Suh, Kwang-Sun Kim
Proc. ASME. IMECE2012, Volume 7: Fluids and Heat Transfer, Parts A, B, C, and D, 3061-3066, November 9–15, 2012
Paper No: IMECE2012-87205
https://doi.org/10.1115/IMECE2012-87205
View Paper titled, A Study on the Internal Thermal Problems for Low Temperature Furnace in Semiconductor Processing
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Topics: Furnaces, Low temperature, Semiconductors (Materials), Semiconductor wafers, Temperature, Heat treating (Metalworking), Temperature distribution, Design, Manufacturing, Computational fluid dynamics
Proceedings Papers

A Study on the Fluid Flow for Effective Polishing Process in CMP Equipment

Kang-Woo Joo, Suyeon Lee, Jiyoung Hwang, Kwang-Sun Kim
Proc. ASME. IMECE2012, Volume 5: Education and Globalization; General Topics, 551-555, November 9–15, 2012
Paper No: IMECE2012-87213
https://doi.org/10.1115/IMECE2012-87213
View Paper titled, A Study on the Fluid Flow for Effective Polishing Process in CMP Equipment
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Topics: Fluid dynamics, Polishing, Slurries, Nozzles, Semiconductor wafers, Density, Electrical wires, Flow (Dynamics), Integrated circuit fabrication, Metals
Proceedings Papers

Numerical Analysis on Thermal Deformation of Linear Motor in Chip Mounter

Kang-Woo Joo, Kwang-Sun Kim, Jun-Young Kim, Hee-Rak Beom
Proc. ASME. IMECE2011, Volume 6: Fluids and Thermal Systems; Advances for Process Industries, Parts A and B, 1347-1354, November 11–17, 2011
Paper No: IMECE2011-63611
https://doi.org/10.1115/IMECE2011-63611
View Paper titled, Numerical Analysis on Thermal Deformation of Linear Motor in Chip Mounter
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Topics: Heat transfer, Linear motors, Numerical analysis, Thermal deformation