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Journal Articles

Deterministic Assembly of Arrays of Lithographically Defined WS 2 and MoS 2 Monolayer Features Directly From Multilayer Sources Into Van Der Waals Heterostructures

Vu Nguyen, Hannah Gramling, Clarissa Towle, Wan Li, Der-Hsien Lien, Hyungjin Kim, Daryl C. Chrzan, Ali Javey, Ke Xu, Joel Ager, Hayden Taylor
Journal: Journal of Micro and Nano-Manufacturing
Article Type: Research-Article
J. Micro Nano-Manuf. December 2019, 7(4): 041006.
Paper No: JMNM-19-1025
DOI: https://doi.org/10.1115/1.4045259
Published Online: November 21, 2019
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Topics: Adhesives, Manufacturing, Transparency, Semiconductor wafers, Heat, Photoresists
Journal Articles

Direct-Write Photolithography for Cylindrical Tooling Fabrication in Roll-to-Roll Microcontact Printing

Larissa F. Nietner, David E. Hardt
Journal: Journal of Micro and Nano-Manufacturing
Article Type: Research-Article
J. Micro Nano-Manuf. September 2015, 3(3): 031006.
Paper No: JMNM-15-1011
DOI: https://doi.org/10.1115/1.4030766
Published Online: September 1, 2015
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Topics: Geometry, Lasers, Manufacturing, Photolithography, Photoresists, Printing, Robustness, Shapes, Simulation, Tooling
Journal Articles

Fabrication of Three-Dimensional Functional Microstructures on Curved Substrates Using Three-Dimensional Microlens Projection

Hao Zhang, Lei Li, Sebastian Scheiding, Andreas Gebhardt, Stefan Risse, Ramona Eberhardt, Andreas Tünnermann, Donggang Yao, Allen Y. Yi
Journal: Journal of Micro and Nano-Manufacturing
Article Type: Research-Article
J. Micro Nano-Manuf. September 2013, 1(3): 031006.
Paper No: JMNM-12-1080
DOI: https://doi.org/10.1115/1.4025060
Published Online: August 13, 2013
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Topics: Manufacturing, Micromachining, Photoresists, Resolution (Optics), Spin (Aerodynamics), Functionally graded materials, Calibration