Laser-induced plasma micromachining (LIP-MM) is a novel multimaterial and tool-less micromachining process. It utilizes tightly focused ultrashort laser irradiation to generate plasma through laser-induced dielectric breakdown in a dielectric material. The plasma facilitates material removal through plasma–matter interaction spot through vaporization and ablation. The paper introduces the LIP-MM process, discusses the underlying principles behind plasma generation and machining, and proves its feasibility by describing the experimental conditions under which plasma generation and machining occur. Upon successful commercial realization of this novel process, the key benefits envisaged are micromachining with better accuracy and better surface integrity, minimal subsurface damage, relatively smaller heat-affected zone (HAZ) and low roughness in a wide range of materials including those that are difficult to machine by some of the most successful micromachining processes such as micro-electrodischarge machining (EDM) and laser ablation.
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September 2015
Research-Article
Laser-Induced Plasma Micromachining Process: Principles and Performance
Kumar Pallav,
Kumar Pallav
1
Department of Mechanical Engineering,
e-mail: kumarpallav2008@u.northwestern.edu
Northwestern University
,Evanston, IL 60208
e-mail: kumarpallav2008@u.northwestern.edu
1Corresponding author.
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Ishan Saxena,
Ishan Saxena
Department of Mechanical Engineering,
Northwestern University
,Evanston, IL 60208
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K. F. Ehmann
K. F. Ehmann
Department of Mechanical Engineering,
Northwestern University
,Evanston, IL 60208
Search for other works by this author on:
Kumar Pallav
Department of Mechanical Engineering,
e-mail: kumarpallav2008@u.northwestern.edu
Northwestern University
,Evanston, IL 60208
e-mail: kumarpallav2008@u.northwestern.edu
Ishan Saxena
Department of Mechanical Engineering,
Northwestern University
,Evanston, IL 60208
K. F. Ehmann
Department of Mechanical Engineering,
Northwestern University
,Evanston, IL 60208
1Corresponding author.
Contributed by the Manufacturing Engineering Division of ASME for publication in the JOURNAL OF MICRO- AND NANO-MANUFACTURING. Manuscript received January 20, 2015; final manuscript received May 27, 2015; published online June 24, 2015. Assoc. Editor: Nicholas Fang.
J. Micro Nano-Manuf. Sep 2015, 3(3): 031004 (8 pages)
Published Online: September 1, 2015
Article history
Received:
January 20, 2015
Revision Received:
May 27, 2015
Online:
June 24, 2015
Citation
Pallav, K., Saxena, I., and Ehmann, K. F. (September 1, 2015). "Laser-Induced Plasma Micromachining Process: Principles and Performance." ASME. J. Micro Nano-Manuf. September 2015; 3(3): 031004. https://doi.org/10.1115/1.4030706
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