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Keywords: electrostatic actuators
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Journal Articles
Article Type: Research Papers
J. Mech. Des. September 2009, 131(9): 091002.
Published Online: August 17, 2009
... the optimal operating environment for the attached device that requires vibration isolation. An active micromachined vibration isolator can be realized by combining a state sensor, and electrostatic actuator and feedback electronics with the passive isolator. Using this approach, a prototype active...
Journal Articles
Article Type: Research Papers
J. Mech. Des. September 2006, 128(5): 1101–1112.
Published Online: December 6, 2005
... range. Most actuators possess a finite passive stiffness. Consequently, for a given stimulus to the actuator, such as the applied voltage in an electrostatic actuator, the output force decreases with increasing output displacement (i.e., stroke). Huber...