In the last decades, grippers have been employed extensively at the microscale, for example, in microbiology and in microassembly. In these fields, specifically, it is essential to improve the performance of these systems in terms of precision, actuation, and sensing of the gripping force. Recent investigations drew attention on the tip–environment interaction force, which gave rise to further studies on the tip compliance behavior. This paper reveals a new method for designing MEMS technology-based compliant microgrippers with prescribed specifications for the jaw tip compliance. This approach relies on the equivalence between a compliant mechanism and its corresponding pseudorigid-body model (PRBM), the former embedding conjugate surfaces flexure hinges (CSFHs) as flexures. Such correspondence has been assessed by means of finite element analysis (FEA) simulations and theoretical models.
Issue Section:
Design of Mechanisms and Robotic Systems
References
1.
McAllister
, D. V.
, Allen
, M. G.
, and Prausnitz
, M. R.
, 2000
, “Microfabricated Microneedles for Gene and Drug Delivery
,” Annu. Rev. Biomed. Eng.
, 2
(1
), pp. 289
–313
.2.
Kimura
, Y.
, and Yanagimachi
, R.
, 1995
, “Intracytoplasmic Sperm Injection in the Mouse
,” Biol. Reprod.
, 52
(4
), pp. 709
–720
.3.
Garcés-Schröder
, M.
, Leester-Schädel
, M.
, Schulz
, M.
, Böl
, M.
, and Dietzel
, A.
, 2015
, “Micro-Gripper: A New Concept for a Monolithic Single-Cell Manipulation Device
,” Sens. Actuators, A
, 236
, pp. 130
–139
.4.
Ingber
, D. E.
, 2006
, “Cellular Mechanotransduction: Putting All the Pieces Together Again
,” FASEB J.
, 20
(7
), pp. 811
–827
.5.
Moeendarbary
, E.
, and Harris
, A. R.
, 2014
, “Cell Mechanics: Principles, Practices, and Prospects
,” Wiley Interdiscip. Rev.: Syst. Biol. Med.
, 6
(5
), pp. 371
–388
.6.
Cecil
, J.
, Powell
, D.
, and Vasquez
, D.
, 2007
, “Assembly and Manipulation of Micro Devices—A State of the Art Survey
,” Rob. Comput.-Integr. Manuf.
, 23
(5
), pp. 580
–588
.7.
Carrozza
, M. C.
, Eisinberg
, A.
, Menciassi
, A.
, Campolo
, D.
, Micera
, S.
, and Dario
, P.
, 2000
, “Towards a Force-Controlled Microgripper for Assembling Biomedical Microdevices
,” J. Micromech. Microeng.
, 10
(2
), pp. 271
–276.8.
Kim
, D.-H.
, Kim
, B.
, and Kang
, H.
, 2004
, “Development of a Piezoelectric Polymer-Based Sensorized Microgripper for Microassembly and Micromanipulation
,” Microsyst. Technol.
, 10
(4
), pp. 275
–280
.9.
Chronis
, N.
, and Lee
, L.
, 2004
, “Polymer MEMS-Based Microgripper for Single Cell Manipulation
,” 17th IEEE
International Conference on Micro Electro Mechanical Systems
, pp. 17
–20
.10.
Sun
, X.
, Chen
, W.
, Fatikow
, S.
, Tian
, Y.
, Zhou
, R.
, Zhang
, J.
, and Mikczinski
, M.
, 2015
, “A Novel Piezo-Driven Microgripper With a Large Jaw Displacement
,” Microsyst. Technol.
, 21
(4
), pp. 931
–942
.11.
Hamedi
, M.
, Salimi
, P.
, and Vismeh
, M.
, 2012
, “Simulation and Experimental Investigation of a Novel Electrostatic Microgripper System
,” Microelectron. Eng.
, 98
, Special issue MNE 2011 – Part II, pp. 467
–471
.12.
Wierzbicki
, R.
, Houston
, K.
, Heerlein
, H.
, Barth
, W.
, Debski
, T.
, Eisinberg
, A.
, Menciassi
, A.
, Carrozza
, M.
, and Dario
, P.
, 2006
, “Design and Fabrication of an Electrostatically Driven Microgripper for Blood Vessel Manipulation
,” Microelectron. Eng.
, 83
(4–9
), pp. 1651
–1654
.13.
Zhang
, Y.
, Chen
, B.
, Liu
, X.
, and Sun
, Y.
, 2010
, “Autonomous Robotic Pick-and-Place of Microobjects
,” IEEE Trans. Rob.
, 26
(1
), pp. 200
–207
.14.
Chen
, T.
, Sun
, L.
, Chen
, L.
, Rong
, W.
, and Li
, X.
, 2010
, “A Hybrid-Type Electrostatically Driven Microgripper With an Integrated Vacuum Tool
,” Sens. Actuators, A
, 158
(2
), pp. 320
–327
.15.
Yeh
, J.
, Jiang
, S.-S.
, and Lee
, C.
, 2006
, “MOEMS Variable Optical Attenuators Using Rotary Comb Drive Actuators
,” IEEE Photonics Technol. Lett.
, 18
(10
), pp. 1170
–1172
.16.
Cecchi
, R.
, Verotti
, M.
, Capata
, R.
, Dochshanov
, A.
, Broggiato
, G.
, Crescenzi
, R.
, Balucani
, M.
, Natali
, S.
, Razzano
, G.
, Lucchese
, F.
, Bagolini
, A.
, Bellutti
, P.
, Sciubba
, E.
, and Belfiore
, N.
, 2015
, “Development of Micro-Grippers for Tissue and Cell Manipulation With Direct Morphological Comparison
,” Micromachines
, 6
(11
), pp. 1710
–1728
.17.
Zeman
, M. J. F.
, Bordatchev
, E. V.
, and Knopf
, G. K.
, 2006
, “Design, Kinematic Modeling and Performance Testing of an Electro-Thermally Driven Microgripper for Micromanipulation Applications
,” J. Micromech. Microeng.
, 16
(8
), p. 1540
.18.
Zhang
, R.
, Chu
, J.
, Wang
, H.
, and Chen
, Z.
, 2013
, “A Multipurpose Electrothermal Microgripper for Biological Micro-Manipulation
,” Microsyst. Technol.
, 19
(1
), pp. 89
–97
.19.
Chang
, R.
, Wang
, H.
, and Wang
, Y.
, 2003
, “Development of Mesoscopic Polymer Gripper System Guided by Precision Design Axioms
,” Precis. Eng.
, 27
(4
), pp. 362
–369
.20.
Kohl
, M.
, Just
, E.
, Pfleging
, W.
, and Miyazaki
, S.
, 2000
, “SMA Microgripper With Integrated Antagonism
,” Sens. Actuators, A
, 83
(1–3
), pp. 208
–213
.21.
Chen
, T.
, Chen
, L.
, Sun
, L.
, Wang
, J.
, and Li
, X.
, 2008
, “A Sidewall Piezoresistive Force Sensor Used in a MEMS Gripper
,” International Conference on Intelligent Robotics and Applications Proceedings, Part II, ICIRA
, Wuhan, China, Oct. 15–17. pp. 207
–216
.22.
Zubir
, M. N. M.
, Shirinzadeh
, B.
, and Tian
, Y.
, 2009
, “Development of a Novel Flexure-Based Microgripper for High Precision Micro-Object Manipulation
,” Sens. Actuators, A
, 150
(2
), pp. 257
–266
.23.
Lan
, C.-C.
, Lin
, C.-M.
, and Fan
, C.-H.
, 2011
, “A Self-Sensing Microgripper Module With Wide Handling Ranges
,” IEEE/ASME Trans. Mechatronics
, 16
(1
), pp. 141
–150
.24.
Shen
, Y.
, Winder
, E.
, Xi
, N.
, Pomeroy
, C.
, and Wejinya
, U.
, 2006
, “Closed-Loop Optimal Control-Enabled Piezoelectric Microforce Sensors
,” IEEE/ASME Trans. Mechatronics
, 11
(4
), pp. 420
–427
.25.
Lu
, Z.
, Chen
, P.
, Ganapathy
, A.
, Zhao
, G.
, Nam
, J.
, Yang
, G.
, Burdet
, E.
, Teo
, C.
, Meng
, Q.
, and Lin
, W.
, 2006
, “A Force-Feedback Control System for Micro-Assembly
,” J. Micromech. Microeng.
, 16
(9
), pp. 1861
–1868
.26.
Rakotondrabe
, M.
, Rabenorosoa
, K.
, Agnus
, J.
, and Chaillet
, N.
, 2011
, “Robust Feedforward-Feedback Control of a Nonlinear and Oscillating 2-DoF Piezocantilever
,” IEEE Trans. Autom. Sci. Eng.
, 8
(3
), pp. 506
–519
.27.
Estevez
, P.
, Bank
, J.
, Porta
, M.
, Wei
, J.
, Sarro
, P.
, Tichem
, M.
, and Staufer
, U.
, 2012
, “6 DOF Force and Torque Sensor for Micro-Manipulation Applications
,” Sens. Actuators, A
, 186
, Selected Papers presented at Eurosensors XXV – Athens, Greece, Sept. 4–7, pp. 86
–93
.28.
Wei
, J.
, Porta
, M.
, Tichem
, M.
, and Sarro
, P.
, 2009
, “A Contact Position Detection and Interaction Force Monitoring Sensor for Micro-Assembly Applications
,” International Solid-State Sensors, Actuators and Microsystems Conference
, TRANSDUCERS, IEEE
, pp. 2385
–2388
.29.
Xu
, Q.
, 2015
, “Design, Fabrication, and Testing of an MEMS Microgripper With Dual-Axis Force Sensor
,” IEEE Sens. J.
, 15
(10
), pp. 6017
–6026
.30.
Kim
, K.
, Liu
, X.
, Zhang
, Y.
, and Sun
, Y.
, 2008
, “Nanonewton Force-Controlled Manipulation of Biological Cells Using a Monolithic MEMS Microgripper With Two-Axis Force Feedback
,” J. Micromech. Microeng.
, 18
(5
), p. 055013
.31.
Rabenorosoa
, K.
, Clévy
, C.
, Chen
, Q.
, and Lutz
, P.
, 2012
, “Study of Forces During Microassembly Tasks Using Two-Sensing-Fingers Grippers
,” IEEE/ASME Trans. Mechatronics
, 17
(5
), pp. 811
–821
.32.
Verotti
, M.
, and Belfiore
, N.
, 2016
, “Isotropic Compliance in E(3): Feasibility and Workspace Mapping
,” ASME J. Mech. Rob.
, 8
(6
), p. 061005
.33.
Verotti
, M.
, Masarati
, P.
, Morandini
, M.
, and Belfiore
, N.
, 2016
, “Isotropic Compliance in the Special Euclidean Group SE(3)
,” Mech. Machine Theory
, 98
, pp. 263
–281
.34.
Howell
, L. L.
, Magleby
, S. P.
, and Olsen
, B. M.
, 2013
, Handbook of Compliant Mechanisms
, Wiley
, New York.35.
Howell
, L.
, 2001
, Compliant Mechanisms
, Wiley-Interscience
, New York.36.
Lobontiu
, N.
, Garcia
, E.
, Goldfarb
, M.
, and Paine
, J. S.
, 2001
, “Corner-Filleted Flexure Hinges
,” ASME J. Mech. Des.
, 123
(3
), pp. 346
–352
.37.
Yong
, Y. K.
, Lu
, T.-F.
, and Handley
, D. C.
, 2008
, “Review of Circular Flexure Hinge Design Equations and Derivation of Empirical Formulations
,” Precis. Eng.
, 32
(2
), pp. 63
–70
.38.
Verotti
, M.
, 2016
, “Analysis of the Center of Rotation in Primitive Flexures: Uniform Cantilever Beams With Constant Curvature
,” Mech. Machine Theory
, 97
, pp. 29
–50
.39.
Pei
, X.
, Yu
, J.
, Zong
, G.
, Bi
, S.
, and Su
, H.
, 2009
, “The Modeling of Cartwheel Flexural Hinges
,” Mech. Machine Theory
, 44
(10
), pp. 1900
–1909
.40.
Cannon
, J.
, and Howell
, L.
, 2005
, “A Compliant Contact-Aided Revolute Joint
,” Mech. Machine Theory
, 40
(11
), pp. 1273
–1293
.41.
Machekposhti
, D. F.
, Tolou
, N.
, and Herder
, J.
, 2015
, “A Review on Compliant Joints and Rigid-Body Constant Velocity Universal Joints Toward the Design of Compliant Homokinetic Couplings
,” ASME J. Mech. Des.
, 137
(3
), p. 032301
.42.
Howell
, L.
, and Midha
, A.
, 1995
, “Parametric Deflection Approximations for End-Loaded, Large-Deflection Beams in Compliant Mechanisms
,” ASME J. Mech. Des.
, 117
(1
), pp. 156
–165
.43.
Meng
, Q.
, Li
, Y.
, and Xu
, J.
, 2014
, “A Novel Analytical Model for Flexure-Based Proportion Compliant Mechanisms
,” Precis. Eng.
, 38
(3
), pp. 449
–457
.44.
Belfiore
, N.
, Broggiato
, G.
, Verotti
, M.
, Balucani
, M.
, Crescenzi
, R.
, Bagolini
, A.
, Bellutti
, P.
, and Boscardin
, M.
, 2015
, “Simulation and Construction of a MEMS CSFH Based Microgripper
,” Int. J. Mech. Control
, 16
(1
), pp. 21
–30
.45.
Verotti
, M.
, Crescenzi
, R.
, Balucani
, M.
, and Belfiore
, N. P.
, 2015
, “MEMS-Based Conjugate Surfaces Flexure Hinge
,” ASME J. Mech. Des.
, 137
(1
), p. 012301
.46.
Laermer
, F.
, and Schilp
, A.
, 1994
, “Method for Anisotropically Etching Silicon
,” Patent Nos. DE4241045C1, EP0625285A1, EP0625285B1, US5501893, and WO1994014187A1.47.
Tachi
, S.
, Tsujimoto
, K.
, and Okudaira
, S.
, 1988
, “Low-Temperature Reactive Ion Etching and Microwave Plasma Etching of Silicon
,” Appl. Phys. Lett.
, 52
(8
), pp. 616
–618
.48.
Parasuraman
, J.
, Summanwar
, A.
, Marty
, F.
, Basset
, P.
, Angelescu
, D.
, and Bourouina
, T.
, 2014
, “Deep Reactive Ion Etching of Sub-Micrometer Trenches With Ultra High Aspect Ratio
,” Microelectron. Eng.
, 113
, pp. 35
–39
.49.
Marty
, F.
, Rousseau
, L.
, Saadany
, B.
, Mercier
, B.
, Français
, O.
, Mita
, Y.
, and Bourouina
, T.
, 2005
, “Advanced Etching of Silicon Based on Deep Reactive Ion Etching For Silicon High Aspect Ratio Microstructures and Three-Dimensional Micro- and Nanostructures
,” Microelectron. J.
, 36
(7
), pp. 673
–677
.50.
Owen
, K. J.
, VanDerElzen
, B.
, Peterson
, R. L.
, and Najafi
, K.
, 2012
, “High Aspect Ratio Deep Silicon Etching
,” IEEE
25th International Conference on Micro Electro Mechanical Systems (MEMS)
, pp. 251
–254
.51.
Tillocher
, T.
, Kafrouni
, W.
, Ladroue
, J.
, Lefaucheux
, P.
, Boufnichel
, M.
, Ranson
, P.
, and Dussart
, R.
, 2011
, “Optimization of Submicron Deep Trench Profiles With the Stiger Cryoetching Process: Reduction of Defects
,” J. Micromech. Microeng.
, 21
(8
), p. 085005
.52.
Belfiore
, N.
, Verotti
, M.
, Di Giamberardino
, P.
, and Rudas
, I.
, 2012
, “Active Joint Stiffness Regulation to Achieve Isotropic Compliance in the Euclidean Space
,” ASME J. Mech. Rob.
, 4
(4
), p. 041010
.53.
Wang
, D. H.
, Yang
, Q.
, and Dong
, H. M.
, 2013
, “A Monolithic Compliant Piezoelectric-Driven Microgripper: Design, Modeling, and Testing
,” IEEE/ASME Trans. Mechatronics
, 18
(1
), pp. 138
–147
.54.
Huang
, S.
, and Schimmels
, J. M.
, 2016
, “Realization of Point Planar Elastic Behaviors Using Revolute Joint Serial Mechanisms Having Specified Link Lengths
,” Mech. Machine Theory
, 103
, pp. 1
–20
.55.
Tsai
, L.-W.
, 1999
, Robot Analysis: The Mechanics of Serial and Parallel Manipulators
, Wiley
, New York.56.
Hopcroft
, M. A.
, Nix
, W. D.
, and Kenny
, T. W.
, 2010
, “What Is the Young's Modulus of Silicon?
,” J. Microelectromech. Syst.
, 19
(2
), pp. 229
–238
.57.
Petersen
, K. E.
, 1982
, “Silicon as a Mechanical Material
,” Proc. IEEE
, 70
(5
), pp. 420
–457
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