The shape memory effect, superelasticity and two-way shape memory effect of Ni-rich Ti-Ni sputter-deposited thin films were evaluated quantitatively. The results indicated that they are almost comparable to those of bulk specimens. On the other hand, Ti-rich Ti-Ni thin films were found to exhibit a good shape memory behavior owing to a peculiar fine microstructure unlike bulk specimens. Addition of Cu or Pd to a Ti-50at.%Ni thin film was also confirmed to improve the shape memory behavior. These results suggest that shape memory thin films are a promising material for microactuators.
Issue Section:
Research Papers
1.
Busch
J. D.
Johnson
A. D.
Hodgson
D. E.
Lee
C. H.
Stevenson
D. A.
1990
, “Development of Shape Memory Properties in Sputter Deposited Films of Nickel-Titanium Alloys
,” Materials Science Forum
, Vol. 56–58
, p. 729
729
.2.
Chang
L.
Simpson
C. Hu
Grummon
D. S.
Pratt
W.
Loloee
R.
1990
, “Structure and Phase Transformations in Thermoelastic Ni(1-x)TiCu(x) Thin Films Prepared by D.C. Magnetron Sputtering
,” Mat. Res. Soc. Symp. Proc.
, Vol. 187
, p. 137
137
.3.
Chang
L.
Grummon
D. S.
Structure Evolution in Sputtered Thin Films of Tix (Ni, Cu)1-x I: Diffusive Transformations
,” Phil. Mag. A
, Vol. 76
, p. 163
163
.4.
Gyobu
A.
Kawamura
Y.
Horikawa
H.
Saburi
T.
1996
, “Martensitic Transformations in Sputter-Deposited Shape Memory Ti-Ni Films
,” Mater. Trans. JIM
, Vol. 37
, p. 697
697
.5.
Hashinaga
T.
Miyazaki
S.
Ueki
T.
Horikawa
H.
1995
, “Transformation and Deformation Behavior in Sputter-Deposited Ti-Ni-Cu Thin Films
,” J. Physique IV
, Vol. 5
, p. 8
–689
.6.
Ishida
A.
Takei
A.
Miyazaki
S.
1993
, “Shape Memory Thin Film of Ti-Ni Formed by Sputtering
,” Thin Solid Films
, Vol. 228
, p. 210
210
.7.
Ishida
A.
Sato
M.
Takei
A.
Miyazaki
S.
1995
, “Effect of Heat Treatment on Shape Memory Behavior of Ti-rich Ti-Ni Thin Films
,” Mater. Trans. JIM
, Vol. 36
, p. 1349
1349
.8.
Ishida
A.
Takei
A.
Sato
M.
Miyazaki
S.
1996
a, “Stress-Strain Curves of Sputtered Thin Films of Ti-Ni
,” Thin Solid Films
, Vol. 281–282
, p. 337
337
.9.
Ishida
A.
Sato
M.
Takei
A.
Nomura
K.
Miyazaki
S.
1996
b, “Effect of Aging on Shape Memory Behavior of Ti-51.3at. Pct Ni Thin Films
,” Metall. Mater. Trans. A
, Vol. 27A
, p. 3753
3753
.10.
Ishida
A.
Ogawa
K.
Sato
M.
Miyazaki
S.
1997
a, “Microstructure of Ti-48.2at. Pct Ni Shape Memory Thin Films
,” Metall. Mater. Trans. A
, Vol. 28A
, p. 1985
1985
.11.
Ishida, A., Sato, M., and Miyazaki, S., 1997b, “Microstructure of Ti-rich Ti-Ni Thin Films,” Proc. Int. Conf. on Shape Memory and Superelastic Technologies (SMST-97), Pacific Grove, CA, p. 161.
12.
Ishida, A., Sato, M., and Miyazaki, S., 1998, “Stress-Strain Curves of Sputter-Deposited Thin Films of Ti-Ni,” Phil. Mag., to be submitted.
13.
Johnson
A. D.
1991
, “Vacuum-deposited TiNi Shape Memory Film: Characterization and Applications in Microdevices
,” J. Micromech., Microeng.
, Vol. 1
, p. 34
34
.14.
Johnson
A. D.
Martynov
V. V.
Minners
R. S.
1995
, “Sputter Deposition of High Transition Temperature Ti-Ni-Hf Alloy Thin Films
,” J. Physique IV
, Vol. 5
, p. 8
–783
.15.
Kajiwara
S.
Kikuchi
T.
Ogawa
K.
Matsunaga
T.
Miyazaki
S.
1996
, “Strengthening of Ti-Ni Shape-Memory Films by Coherent Subnanometric Plate Precipitates
,” Phil. Mag. Letters
, Vol. 74
, p. 137
137
.16.
Kuribayashi, K., 1990, “Reversible SMA Actuator for Micron Sized Robot,” IEEE Workshop on MEMS, Napa Valley, p. 217.
17.
Lin, H. C., Wu, Shyi-Kaan, and Lin, J. C., 1992, “A Study of the Martensitic Transformation in Ti-rich TiNi Alloys,” Proc. Int. Conf. on Martensitic Transformations, Monterey, CA, p. 875.
18.
Miyazaki
S.
Ohmi
Y.
Otsuka
K.
Suzuki
Y.
1982
, “Characteristics of Deformation and Transformation Pseudoelasticity in Ti-Ni Alloys
,” J. Physique
, Vol. 43
, p. 4
–255
.19.
Miyazaki, S., Ishida, A., and Takei, A., 1992, “Shape Memory Characteristics of Ti-Ni Thin Films Formed by Sputtering,” Proc. Int. Conf. on Martensitic Transformations, Monterey, CA, p. 893.
20.
Miyazaki
S.
Ishida
A.
1994
a, “Shape Memory Characteristics of Sputter-Deposited Ti-Ni Thin Films
,” Mater. Trans. JIM
, Vol. 35
, p. 14
14
.21.
Miyazaki, S., Nomura, K., and Zhirong, He., 1994b, “Shape Memory Effect and Superelasticity Developed in Sputter-Deposited Ti-Ni Thin Films,” Proc. Int. Conf. on Shape Memory and Superelastic Technologies (SMST-94), Pacific Grove, CA, p. 19.
22.
Miyazaki
S.
Hashinaga
T.
Yumikura
K.
Horikawa
H.
Ueki
T.
Ishida
A.
1995
a, “Shape Memory Characteristics of Sputter-Deposited Ti-Ni-base Thin Films
,” Smart Materials, SPIE Series
, Vol. 2441
, p. 156
156
.23.
Miyazaki
S.
Nomura
K.
Ishida
A.
1995
b, “Shape Memory Effects Associated with the Martensitic and R-phase Transformations in Sputter-Deposited Ti-Ni Thin Films
,” J. Physique IV
, Vol. 5
, p. 8
–677
.24.
Miyazaki, S., Nomura, K., Ishida, A., and Kajiwara, S., 1998, “Recent Developments in Sputter-Deposited Ti-Ni-Base Shape Memory Alloy Thin Films,” J. Physique IV, in press.
25.
Nakata
Y.
Tadaki
T.
Sakamoto
H.
Tanaka
A.
Shimizu
K.
1995
, “Effect of Heat Treatments on Morphology and Transformation Temperatures of Sputtered Ti-Ni Thin Films
,” J. Physique IV
, Vol. 5
, p. 8
–671
.26.
Nomura
K.
Miyazaki
S.
1995
, “The Stability of Shape Memory Characteristics Against Cyclic Deformation in Ti-Ni Sputter-Deposited Thin Films
,” Smart Materials, SPIE Proc. Series
, Vol.2441
, p. 149
149
.27.
Nomura, K., Miyazaki, S., and Ishida, A., 1996, “Cycling Effect on the Shape Memory Characteristics in Sputter-Deposited Ti-Ni Alloy Thin Films,” Proc. 5th Int. Conf. on New Actuators (ACTUATOR-96), Bremen, Germany, p. 417.
28.
Quandt
E.
Halene
C.
Holleck
H.
Feit
K.
Kohl
M.
Schloßmacher
P.
Skokan
A.
Skrobanek
K. D.
1996
, “Sputter Deposition of TiNi, TiNiPd and TiPd Films Displaying the Two-Way Shape-Memory Effect
,” Sensors and Actuators A
, Vol. 53
, p. 434
434
.29.
Sato
M.
Ishida
A.
Takei
A.
Miyazaki
S.
1996
, “Effect of Thermal Cycling on the Shape Memory Characteristics of Ti-50at.% and 52at.%Ni Thin Films
,” J. of the Surface Finishing Society of Japan
, Vol. 47
, p. 229
229
.30.
Sato
M.
Ishida
A.
Miyazaki
S.
1998
, “Two-Way Shape Memory Effect of Sputter-Deposited Thin Films of Ti-51.3at.%Ni
,” Thin Solid Films
, Vol. 315
, p. 305
305
.
This content is only available via PDF.
Copyright © 1999
by The American Society of Mechanical Engineers
You do not currently have access to this content.