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Keywords: laser scribingClose
Article Type: Research Papers
J. Manuf. Sci. Eng. October 2009, 131(5): 051002.
Published Online: September 4, 2009
...Koji Yamamoto; Noboru Hasaka; Hideki Morita; Etsuji Ohmura A mechanical breaking process after laser scribing is indispensable to complete the separation of glass substrate since the crack depth induced by the laser scribing is limited. Laser irradiation along the laser scribed line is introduced...