Laser micromachining has several advantages such as the capability of flexibly producing very small features in both conductive and nonconductive materials. However, it may often suffer from induced defects, such as debris deposition on workpieces. To improve laser micromachining, a novel machining process, called “ultrasound-assisted water-confined laser micromachining” (UWLM), was proposed by the corresponding author. The ultrasound during UWLM can be applied through different approaches, such as an ultrasonic horn or a high-intensity focused ultrasound (HIFU) transducer, which can be called horn- and HIFU-based UWLM, respectively. This is the first paper (to the authors’ best knowledge) reporting experimental studies on microhole drilling using the novel HIFU-based UWLM process. In this study, drilled workpieces have been characterized; and in situ time-resolved shadowgraph imaging and pressure measurement during the UWLM process have been performed. Under the investigated conditions, it has been found that the microholes drilled by HIFU-based UWLM under suitable conditions appear reasonably clean without significant debris depositions often seen for a nanosecond (ns) laser ablation in air. The UWLM process can produce much larger average ablation depths per pulse than laser ablation in water without ultrasound (e.g., for copper, the former depth can be up to more than six times the latter). The study has revealed one important mechanism for the enhanced ablation depth, which is introduced in more details in the paper.
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September 2019
Research-Article
Microhole Drilling by High-Intensity Focused Ultrasound-Assisted Water-Confined Laser Micromachining
Ze Liu,
Ze Liu
School of Mechanical Engineering,
West Lafayette, IN 47907
e-mail: liu1583@purdue.edu
Purdue University
,West Lafayette, IN 47907
e-mail: liu1583@purdue.edu
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Benxin Wu,
Benxin Wu
2
Associate Professor
School of Mechanical Engineering,
585 Purdue Mall,
West Lafayette, IN 47907
e-mail: wu65@purdue.edu
School of Mechanical Engineering,
Purdue University
,585 Purdue Mall,
West Lafayette, IN 47907
e-mail: wu65@purdue.edu
2Corresponding author.
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Zheng Kang,
Zheng Kang
School of Mechanical Engineering,
West Lafayette, IN 47907
e-mail: kang214@purdue.edu
Purdue University
,West Lafayette, IN 47907
e-mail: kang214@purdue.edu
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Zhen Yang
Zhen Yang
School of Mechanical Engineering,
West Lafayette, IN 47907
e-mail: yang912@purdue.edu
Purdue University
,West Lafayette, IN 47907
e-mail: yang912@purdue.edu
Search for other works by this author on:
Ze Liu
School of Mechanical Engineering,
West Lafayette, IN 47907
e-mail: liu1583@purdue.edu
Purdue University
,West Lafayette, IN 47907
e-mail: liu1583@purdue.edu
Benxin Wu
Associate Professor
School of Mechanical Engineering,
585 Purdue Mall,
West Lafayette, IN 47907
e-mail: wu65@purdue.edu
School of Mechanical Engineering,
Purdue University
,585 Purdue Mall,
West Lafayette, IN 47907
e-mail: wu65@purdue.edu
Zheng Kang
School of Mechanical Engineering,
West Lafayette, IN 47907
e-mail: kang214@purdue.edu
Purdue University
,West Lafayette, IN 47907
e-mail: kang214@purdue.edu
Zhen Yang
School of Mechanical Engineering,
West Lafayette, IN 47907
e-mail: yang912@purdue.edu
Purdue University
,West Lafayette, IN 47907
e-mail: yang912@purdue.edu
1
Present address: Guangdong Lyric Robot Intelligent Automation Co., Ltd., China.
2Corresponding author.
3
Present address: Shanghai Rencheng Technology Co., Ltd, China.
Manuscript received July 9, 2018; final manuscript received June 2, 2019; published online July 18, 2019. Assoc. Editor: Hongqiang Chen.
J. Manuf. Sci. Eng. Sep 2019, 141(9): 091003 (12 pages)
Published Online: July 18, 2019
Article history
Received:
July 9, 2018
Revision Received:
June 2, 2019
Accepted:
June 3, 2019
Citation
Liu, Z., Wu, B., Kang, Z., and Yang, Z. (July 18, 2019). "Microhole Drilling by High-Intensity Focused Ultrasound-Assisted Water-Confined Laser Micromachining." ASME. J. Manuf. Sci. Eng. September 2019; 141(9): 091003. https://doi.org/10.1115/1.4043979
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