Issue Section:
Discussions
1.
Ka¨lvesten
E.
Lo¨fdahl
L.
Stemme
G.
1996
: Analytical Characterization of Piezoresistive Square-Diaphragm Silicon Microphone
, Sensors and Materials
, Vol. 8
, No. 2
, pp 113
–136
.
This content is only available via PDF.
Copyright © 1996
by The American Society of Mechanical Engineers