Emerging micromachining technology enables us to fabricate mechanical parts on the order of micron size. It provides us with micro-sensors and micro-actuators which facilitate the exploration of all areas of science. Furthermore, these miniature transducers can be integrated with microelectronics. With an integrated system, it then becomes possible to complete the loop of sensing, information processing, and actuation. This type of system enables us to perform real-time control of time varying events which are common in fluid dynamics. In this review paper, we will first briefly introduce Micro-Electro-Mechanical-Systems (MEMS) technology. Then, the applications of MEMS to flow control will be discussed.
1.
Allen M. G., 1993, “Polyimide-based Processes for the Fabrication of Thick Electroplated Microstructures,” Transducers ’93, pp. 60–65.
2.
Arkillic, E., and Breuer, K. S., 1993, “Gaseous Flow in Small Channels,” AIAA Paper No. 93–3270.
3.
Ataka, M., Omodaka, A., and Fujita, H., 1994, “A Biomimetic Micro Motion System—A Ciliary Motion System,” Transducer 93, pp. 38–41.
4.
Bandyopadhyay, P. R. and Gad-el-Hak, M., 1994, “Reynolds Number Effects in Wall-bounded Turbulent Flows,” to appear in Applied Mechanics Reviews.
5.
Bassous
E.
1978
, “Fabrication of Novel Three-Dimensional Microstructures by the Anisotropic Etching of (100) and (110) silicon
,” IEEE Trans. on Electron Devices
, Vol. ED-25
, No. 10
, Oct., pp. 1178
–1185
.6.
Bean
K.
Anisotropic Etching of Silicon, 1978
,” IEEE Trans. on Electron Devices
, Vol. ED-25
, No. 10
, Oct., pp. 1185
–1193
.7.
Becker
E. W.
Ehrfeld
W.
Hagmann
P.
Maner
A.
Munchmeyer
D.
1986
, “Fabrication of Microstructures With High-aspect Ratios and Great Structural Heights by Synchrotron Radiation Lithography, Galvanoformung, and Plastic Moulding (LIGA Process)
,” Microelectronic Engineering
, Vol. 4
, pp. 35
–36
.8.
Beskok, A., and Karniadakis, G. E., 1993, “Simulation of Heat and Momentum Transfer in Complex Micro-Geometries,” AIAA Paper No. 93-3269.
9.
Bloomstein, T. M., and Ehrlich, D. J., 1994, “Laser Stereo Micromachining at One-Half Million Cubic Micrometers per Second,” Solid-State Sensors and Actuators Workshop, Technical Digest, June 13–16, Hilton Head, North Carolina, U.S.A., pp. 142–144.
10.
Brysek, J., Petersen, K., Mallon, J., Christel, L., and Pourahmadi, F., 1990, Silicon Sensors and Microstructures, NovaSensors.
11.
Bryzek, J., Petersen, K., and McCulley, W., 1994, “Micromachines on the March,” IEEE Spectrum, pp. 20–31.
12.
Ehrfeld, W., Gotz, F., Munchmeyer, D., Schelb, W., and Schmidt, D., 1988, “LIGA Process: Sensor Construction Techniques Via X-ray Lithography,” Technical Digest, Solid-State Sensor and Actuator Workshop, Hilton Head, SC, June 6–9, pp. 1–4.
13.
Fan
L. S.
Tai
Y. C.
Muller
R. S.
1988
a, “Integrated Movable Micro-mechanical Structures for Sensors and Actuators
,” IEEE Trans. on Electronic Devices
, Vol. 35
, No. 6
, pp. 724
–730
.14.
Fan, L. S., Tai, Y. C., and Muller, R. S., 1988b, “IC-processed Electrostatic Micromotors,” Technical Digest, IEDM, pp. 666–669.
15.
Feynman, R. P., 1959, “There’s Plenty of Room at the Bottom,” Annual Meeting of the APS, Caltech.
16.
Finne
R. M.
Klein
D. L.
1967
, “A Water-Amine-Completing Agent System for Etching Silicon
,” J. Electrochem. Soc.
, Vol. 114
, No. 9
, Sept., pp. 965
–970
.17.
Frazier, A. B., and Allen, M. G., 1992, “High Aspect Ratio Electroplated Microstructures Using a Photosentive Polyimide Process,” Proc. of Micro Electro Mechanical Systems Workshop, Travemunde, Germany, Feb. pp. 87–92.
18.
Guckel, H., Skrobis, K. J., Christenson, T. R., Klein, J., Han, S., Choi, B., and Lovell, E. G., 1991, “Fabrication of Assembled Micromechanical Components via Deep X-ray Lithography,” Proc. of 1991 IEEE Micro Electro Mechanical System Conf., pp. 74–79.
19.
Gupta, B., Goodman, R., Jiang, F., Tai, Y. C., Tung, S., and Ho, C. M., 1996, “Analog VLSI System for Active Drag Reduction,” Proceedings of the Fifth International Conference on Microelectronics for Neural Networks and Fuzzy Systems, MicroNeuro ’96, Lausanne, Switzerland, Feb. 12–14, pp. 45–52.
20.
Ho
C. M.
Huang
L. S.
1982
, “Subharmonics and Vortex Merging in Mixing Layers
,” JOURNAL OF FLUID MECHANICS
, Vol. 119
, pp. 443
–473
.21.
Ho
C. M.
Huerre
P.
1984
, “Perturbed Free Shear Layers
,” Ann. Rev. of Fluid Mech.
, Vol. 16
, pp. 365
–424
.22.
Ho, C. M., and Tai, Y. C., 1994, “MEMS: Science and Technology,” Application of Microfabriation to Fluid Mechanics, Proceedings of the 1994 International Mechanical Engineering Congress and Exposition, Chicago, IL.
23.
Howe
R. T.
Muller
R. S.
1983
, “Polycrystalline silicon Micromechanical Beams
,” J. Electrochemical Soc.
, Vol. 130
, pp. 1420
–1423
.24.
Huang, J., Ho, C. M., Tung, S., Liu, C., and Tai, Y. C., 1995, “Micro Thermal Shear Stress Sensor With and Without Cavity Underneath,” Proceedings, IEEE Instrumentation and Measurement Technology Conference, Waltham, MA.
25.
Huang, J., Tung, S., Ho, C. M., Liu, C., and Tai, Y. C., 1996, “Improved Micro Thermal Shear-Stress Sensor,” IEEE Transactions on Instrumentation and Measurement, Vol. 45, No. 2, Apr.
26.
Jackson
T. N.
Tischler
M. A.
Wise
K. D.
1981
, “An Electrochemical P-N Junction Etch-Stop for the formation of Silicon Microstructures
,” IEEE Electron Device Letters
, Vol. EDL-2
, No. 2
, Feb., pp. 44
–45
.27.
Jacobson
S. A.
Reynolds
W. C.
1993
, “Active Boundary Layer Control Using Mounted Surface Actuators
,” Bulletin of American Physical Society
, Vol. 38
, pp. 2197
2197
.28.
Jiang, F., Tai, Y. C., Ho, C. M., and Li, W., 1994a, “A Micromachined Polysilicon Hot-wire Anemometer,” 1994 Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC.
29.
Jiang, F., Tai, Y. C., Ho, C. M., Karan, R., and Garstenauer, M., 1994b, “A Theoretical and Experimental Studies of Micromachined Hot-Wire Anemometers,” Technical Digest, IEDM, San Francisco, CA, pp. 264–267.
30.
Jiang, F., Tai, Y. C., Gupta, B., Goodman, R., Tung, S., Huang, J., and Ho, C. M., 1996, “A Surface-Micromachined Shear Stress Imager,” Proceedings of the 9th International IEEE Workshop on MEMS, pp. 110–115, San Diego.
31.
Joo, Y., Dieu, K., and Kim, C.-J., 1995, “Fabrication of Monolithic Micro-channels for IC Chip Cooling,” Proc. of IEEE Micro Electro Mechanical Systems Workshop, Amsterdam, The Netherlands, Jan.–Feb., pp. 362–367.
32.
Kern
W.
1978
, “Chemical Etching of Silicon, Germanium, Gallium Arsenide, and Gallium Phosphide
,” RCA Review
, Vol. 39
, No. 6
, June, pp. 278
–308
.33.
Kendall, D. L., and De Guel, G. R., 1985, “Orientations of The Third Kind: The Coming of The Age of (110) Silicon,” Micromachining and Micropackaging of Transducers, edited by C. D. Fung, P. W. Cheung, W. H. Ko, and D. G. Fleming, eds., Elsevier Science Publishers B. V., Amsterdam, The Netherlands.
34.
Kim
C. J.
Pisano
A. P.
Muller
R. S.
1992
, “Silicon-Processed Overhanging Microgripper
,” J. Microelectromechanical Systems
, Vol. 1
, No. 1
, pp. 31
–36
.35.
Lee
D. B.
1969
, “Anisotropic Etching of Silicon
,” J. Appl. Phys.
, Vol. 40
, No. 11
, Oct., pp. 4569
–4574
.36.
Linder, C., Tschan, T., Rooij, N. F., 1991, “Deep Dry Etching Techniques As a New IC Compatible Tools For Silicon Micromachining,” Technical Digest, Transducers ’91, San Francisco, pp. 54–57.
37.
Liu, C., Tai, Y. C., Huang, J., and Ho, C. M., 1994, “Surface-Micromachined Thermal Shear Stress Sensor,” Application of Microfabrication to Fluid Mechanics, FED-Vol. 197, pp. 9–16, ASME.
38.
Liu, C., Tsao, T., Tai, Y. C., and Ho, C. M., 1994, “Surface Micromachined Magnetic Actuators,” Proceed. IEEE International Workshop on MEMS, MEMS ’94, Oiso, Japan.
39.
Liu, C., Tsao, T., Tai, Y. C., Leu, J., Ho, C. M., Tang, W. L., and Miu, D., 1995a, “Out-Of-Plane Permanent Magnetic Actuators for delta Wing Control,” Proceedings, IEEE Micro Electro Mechanical Systems, Amsterdam, the Netherlands, Jan. 29, pp. 7–12.
40.
Liu, C., Tsao, T., Tai, Y. C., Liu, W., Will, P., and Ho, C. M., 1995b, “A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems,” Technical Digest, Transducers ’95, pp. 328–331.
41.
Matoba, H., Ishikawa, T., Kim, C. J., and Muller, R. S., 1994, “A Bistable Snapping Microactuator,” IEEE Micro Electro Mechanical System Workshop, Oiso, Japan, pp. 45–50.
42.
McMichael, J. M., 1996, “Progress and Prospects for Active Flow Control Using Microfabricated Electro-Mechanical Systems (MEMS),” AIAA paper 96-0306.
43.
Miller, R., Burr, G., Tai, Y. C., Psaltis, D., Ho, C. M., and Katti, R., 1996, “Electromagnetic MEMS Scanning Mirrors for Holographic Data Storage,” Technical Digest, Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC.
44.
Miu, D., Wu, S., Tatic, S., and Tai, Y. C., 1993, “Silicon Micromachined Microstructures for Super-Compact Magnetic Recording Rigid Disk Drives,” Technical Digest, Yokohama, Japan, Transducers ’93, pp. 771–773.
45.
Nathanson
H. C.
Newell
W. E.
Wickstrom
R. A.
Davis
J. R.
1967
, “Resonant Gate Transistors
,” IEEE Trans. on Electron Devices
, Vol. 14
, pp. 117
117
.46.
Najafi
K.
Wise
K. D.
1986
, “An Implantable Multielectrode Array with On-chip Processing
,” IEEE Trans. on Biomed. Eng.
, Vol. 35
, pp. 1035
–1044
.47.
Nature-Times News Service, 1967, The London Times, 23, Nov.
48.
O’Connor
L.
1992
, “MEMS: Microelectromechanical Systems
,” Mechanical Engineering
, Vol. 114
, pp. 40
–47
.49.
Pan, T., Hyman, D., Mehregany, M., Reshotko, E., and Willis, B., 1995, “Calibration of microfabricated shear stress sensors,” Digest of Technical Papers, TRANSDUCERS ’95, Stockholm, Sweden, June, pp. 443–446.
50.
Petersen
K.
1982
, “Silicon as a Mechanical Material
,” Proceedings of the IEEE
, Vol. 70
, No. 5
, pp. 420
–456
.51.
Preston, K., 1972, Coherent Optical Computers, McGraw-Hill, New York.
52.
Raley
N. F.
Sugiyama
Y.
Van Duzer
T.
1984
, “(100) Silicon Etch-Rate Dependence on Boron Concentration in Ethylenediamine Pyrocatechol Water Solutions
,” J. Electrochem. Soc.
, Vol. 131
, No. 1
, Jan., pp. 161
–171
.53.
Reisman
A.
Berkenblit
M.
Chan
S. A.
Kaufman
F. B.
Green
D. C.
1979
, “The Controlled Etching of Silicon in Catalyzed Ethylenediamine-Pyrocatechol-Water Solutions
,” J. Electrochem. Soc.
, Vol. 126
, No. 8
, Aug., pp. 1406
–1415
.54.
Robbins
H.
Schwartz
B.
1959
, “Chemical Etching of Silicon
,” J. Electrochem. Soc.
, Vol. 106
, No. 6
, June, pp. 505
–508
.55.
Sampsell, J. B., 1993, “The Digital Micromirror Device and Its Application to Projection Display,” Technical Digest, Transducers ’93, Yokohama, Japan, pp. 24–27.
56.
Schnakenberg, U., Benecke, W., Lochel, B., Ullerich, S., and Lange, P., 1991, “NH4OH-based Etchants for Silicon Micromachining: Influence of Additives and Stability of Passivation Layers,” Sensors and Actuators, A, 25–27, pp. 1–7.
57.
Schnakenberg, U., Benecke, W., and Lange, P., 1991, “TMAHW Etchants for Silicon Micromachining,” Technical Digest, Transducers ’91, pp. 815–818.
58.
Seidel, H., 1987, “The Mechanism of Anisotropic Silicon Etching and Its Relevance for Micromachining,” Technical Digest, Transducers ’87, Tokyo, Japan, pp. 120–125.
59.
Shajii
J.
Ng
K.-Y.
Schmidt
M. A.
1992
, “A microfabricated floating-element shear stress sensor using wafer-bonding technology
,” IEEE/ASME J. of Microelectromechanical Systems
, Vol. 1
, No. 2
, pp. 89
–94
.60.
Shulman, M. A., Ramaswamy, M., Heytens, M. L., and Senturai, S. D., 1991, “An Object-Oriented Material-Property Database Architecture for Microelectromechanical CAD,” Transducers ’91, pp. 486–489.
61.
Smith
B. L.
Glezer
A.
1995
, “Jet Vectoring by Synthetic Jet Actuators
,” Bulletin of American Physical Society.
, Vol. 40
, pp. 2025
2025
.62.
Tabata, O., Asahi, R., Funabashi, H., and Sugiyama, S., 1991, “Anisotropic Etching of Silicon in (CH3)4NOH Solutions,” Technical Digest, Transducers ’91, pp. 811–814.
63.
Tai
Y. C.
Muller
R. S.
1988
, “Polysilicon Bridge as a Flow Meter
,” Sensors and Actuators
, Vol. 15
, pp. 63
–75
.64.
Tai
Y. C.
Muller
R. S.
1989
, “IC-Processed Electrostatic Synchronous Micromotors
,” Sensors and Actuators
, Vol. 20
, pp. 49
–55
.65.
Tang
W. C.
Nguyen
T. H.
Howe
R. T.
1989
, “Laterally Driven Polysilicon Resonant Microstructures
,” Sensors and Actuators
, Vol. 20
, pp. 25
–32
.66.
Tang
W. C.
Nguyen
T. C. H.
Judy
M. W.
Howe
R. T.
1990
, “Electrostatic-Comb Drive of Lateral Polysilicon Resonators
,” Sensors and Actuators A Physical
, Vol. 21
(1–3
), pp. 328
–331
.67.
Tatic-Lucic, S., Tai, Y. C., Wright, J., Pine, J., and Deunison, T., 1993, “Silicon-micromachined Cultured Neurochip for in vitro Studies of Cultured Neural Networks,” Transducer ’93, pp. 943–945, Japan.
68.
Tatic-Lucic, S., Tai, Y. C., Wright, J., and Pine, J., 1994, “Silicon-micromachined Cultured Neuron Probes for in vivo Studies of Neural Networks,” to be published in ASME Winter Meeting, Chicago.
69.
Tsao, T., Liu, C., Tai, Y. C., and Ho, C. M., 1994, “Micromachined Magnetic Actuator for Active Fluid Control,” Application of Microfabrication to Fluid Mechanics, FED-Vol. 197, pp. 31–38, ASME.
70.
Tung, S., Hong, W., Huang, J., Ho, C. M., Liu, C, and Tai, Y. C., 1995, “Control of a Streamwise Vortex by a Mechanical Actuator,” Tenth Symposium on Turbulent Shear Flows, Pennsylvania State University, University Park. U.S. Patent 2,749,598 (1956).
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