Microfluidics has emerged from the MEMS-technology as an important research field and a promising market. This paper gives an overview on one of the most important microfluidic components: the micropump. In the last decade, various micropumps have been developed. There are only a few review papers on microfluidic devices and none of them were dedicated only to micropumps. This review paper outlines systematically the pump principles and their realization with MEMS-technology. Comparisons regarding pump size, flow rate, and backpressure will help readers to decide their proper design before starting a microfluidics project. Different pump principles are compared graphically and discussed in terms of their advantages and disadvantages for particular applications.
MEMS-Micropumps: A Review
Contributed by the Fluids Engineering Division for publication in the JOURNAL OF FLUIDS ENGINEERING. Manuscript received by the Fluids Engineering Division August 7, 2000; revised manuscript received November 7, 2001. Associate Editor: Y. Matsumoto.
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Nguyen, N., Huang, X., and Chuan, T. K. (May 28, 2002). "MEMS-Micropumps: A Review ." ASME. J. Fluids Eng. June 2002; 124(2): 384–392. https://doi.org/10.1115/1.1459075
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