The paper presents three one-dimensional models to simulate gaseous flows in micro-channels. These include no-slip flow, simple fully-developed, and locally fully-developed models. It is shown that the locally fully-developed model provides a more accurate prediction when both rarefaction and gas acceleration need to be considered in micro-flows. Furthermore, the effects of rarefaction and gas acceleration on the locally dimensionless pressure ratio are specified on the basis of the three models. The validation of these models is accomplished by comparison with the experimental results. [S0098-2202(00)02502-5]

1.
Arkilic E. B., Breuer K. S., and Schmidt M. A., 1994, “Gaseous Flow in Micro-Channels,” Applications of Microfabrication to Fluid Mechanics, ASME, FED-Vol. 197, pp. 57–66.
2.
Arkilic
,
E. B.
,
Schmidt
,
M. A.
, and
Breuer
,
K. S.
,
1997
, “
Gaseous Slip Flow in Long Microchannels
,”
J. Microelectromech. Syst., IEEE
,
6
, pp.
167
178
.
3.
Shih, J. C., Ho, C., Liu, J., and Tai, Y., 1996, “Monatomic and Polyatomic Gas Flow Through Uniform Microchannels,” Microelectromechanical Systems (MEMS), ASME, DSC-59, pp. 197–203.
4.
Piekos
,
E. S.
, and
Breuer
,
K. S.
,
1996
, “
Numerical Modeling of Micromechanical Devices Using the Direct Simulation Monte Carlo Method
,”
ASME J. Fluids Eng.
,
118
, pp.
464
469
.
5.
Sun
,
H.
,
Gu
,
W.
, and
Liu
,
W.
,
1998
, “
Effects of Slip-flow and Temperature-jump on Momentum and Heat Transport in Micro-channels
,”
J. Eng. Thermophys.
,
19
, No.
1
, pp.
94
97
.
6.
van den Berg
,
H. R.
,
ten Seldam
,
C. A.
, and
van der Gulik
,
P. S.
,
1993
, “
Compressible Laminar Flow in a Capillary
,”
J. Fluid Mech.
,
246
, pp.
1
20
.
7.
Beskok
,
A.
,
Karniadakis
,
G. E.
,
Trimmer
,
W.
,
1996
, “
Rarefaction and Compressibility Effects in Gas Microflows
,”
ASME J. Fluids Eng.
,
118
, pp.
448
456
.
8.
Eckert, E. R. G., and Drake R. M., 1972, Analysis of Heat and Mass Transfer, McGraw-Hill, New York.
9.
Pfahler J., Harley J., Bau H. H., and Zemel J., 1990, “Liquid and Gas Transport in Small Channels,” ASME, DSC-19, pp. 149–157.
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