Abstract

Widespread millimeter wave applications have promoted rapid development of system in package (SiP) and antenna in package (AiP). Most AiP structures take the form of flip chip onto antenna substrate, where signal interconnect losses are introduced by solder bumps. The integration may be unavailable for chips with fine pad pitches. Fan-out wafer level package (FOWLP) with antenna patterning on redistributed layers (RDL) is another method for millimeter wave AiP. In this project, a hybrid integration AiP structure is developed. The microwave monolithic integrated circuit (MMIC) chip and antenna unit are integrated with chip-first FOWLP process. Multilayer organic substrate with fine pitch RDL interconnections meets the requirements of wideband antenna design. Modified coplanar waveguide is adopted to feed 2 × 2 aperture array formed on RDL layer. Package warpage is measured using Shadow Moire techniques. The antenna forms an aperture-coupled stacked patch array with bandwidth 25% and gain 8.5dBi for 60 GHz digital communication system. The proposed approach is a convenient hybrid integration solution adopting FOWLP process for millimeter wave AiP systems.

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