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Keywords: surface structure
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Journal Articles
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. March 2004, 126(1): 187–197.
Published Online: April 12, 2004
..., 2002; final revision May 12, 2003. Associate Editor: Ranjan Mukherjee. 12 March 2002 12 May 2003 12 04 2004 scanning tunnelling microscopy micromechanical devices position control physical instrumentation control surface structure In this article, we study...
