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Keywords: physical instrumentation control
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Journal Articles
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. March 2004, 126(1): 187–197.
Published Online: April 12, 2004
..., 2002; final revision May 12, 2003. Associate Editor: Ranjan Mukherjee. 12 March 2002 12 May 2003 12 04 2004 scanning tunnelling microscopy micromechanical devices position control physical instrumentation control surface structure In this article, we study...
Journal Articles
Article Type: Technical Papers
J. Dyn. Sys., Meas., Control. June 2002, 124(2): 297–302.
Published Online: May 10, 2002
... of the approach and the superiority of the finite element based method. The control approach is expected to be implemented on the adaptive optics system of the National Ignition Facility. shape control mirrors finite element analysis adaptive optics least squares approximations physical instrumentation...