This paper deals with nonlinear-parametric frequency response of alternating current (AC) near natural frequency electrostatically actuated microelectromechanical systems (MEMS) cantilever resonators. The model includes fringe and Casimir effects, and damping. Method of multiple scales (MMS) and reduced order model (ROM) method are used to investigate the case of weak nonlinearities. It is reported for uniform resonators: (1) an excellent agreement between the two methods for amplitudes less than half of the gap, (2) a significant influence of fringe effect and damping on bifurcation frequencies and phase–frequency response, respectively, (3) an increase of nonzero amplitudes' frequency range with voltage increase and damping decrease, and (4) a negligible Casimir effect at microscale.
Skip Nav Destination
Article navigation
April 2015
Research-Article
Microelectromechanical Systems Cantilever Resonators Under Soft Alternating Current Voltage of Frequency Near Natural Frequency
Dumitru I. Caruntu,
Dumitru I. Caruntu
1
Mem. ASME
Mechanical Engineering Department,
e-mail: caruntud@utpa.edu
Mechanical Engineering Department,
University of Texas Pan American
,1201 W University Drive
,Edinburg, TX 78539
e-mail: caruntud@utpa.edu
1University of Texas Pan American becomes University of Texas Rio Grande Valley starting Fall 2015, e-mail: caruntud2@asme.org; dcaruntu@yahoo.com.
Search for other works by this author on:
Martin W. Knecht
Martin W. Knecht
Search for other works by this author on:
Dumitru I. Caruntu
Mem. ASME
Mechanical Engineering Department,
e-mail: caruntud@utpa.edu
Mechanical Engineering Department,
University of Texas Pan American
,1201 W University Drive
,Edinburg, TX 78539
e-mail: caruntud@utpa.edu
Martin W. Knecht
1University of Texas Pan American becomes University of Texas Rio Grande Valley starting Fall 2015, e-mail: caruntud2@asme.org; dcaruntu@yahoo.com.
Contributed by the Dynamic Systems Division of ASME for publication in the JOURNAL OF DYNAMIC SYSTEMS, MEASUREMENT, AND CONTROL. Manuscript received November 6, 2012; final manuscript received August 16, 2014; published online January 9, 2015. Assoc. Editor: Qingze Zou.
J. Dyn. Sys., Meas., Control. Apr 2015, 137(4): 041016 (8 pages)
Published Online: April 1, 2015
Article history
Received:
November 6, 2012
Revision Received:
August 16, 2014
Online:
January 9, 2015
Citation
Caruntu, D. I., and Knecht, M. W. (April 1, 2015). "Microelectromechanical Systems Cantilever Resonators Under Soft Alternating Current Voltage of Frequency Near Natural Frequency." ASME. J. Dyn. Sys., Meas., Control. April 2015; 137(4): 041016. https://doi.org/10.1115/1.4028887
Download citation file:
Get Email Alerts
Integral Sliding Mode Disturbance Observer-Based Preview Repetitive Control
J. Dyn. Sys., Meas., Control (July 2024)
Global-Position Tracking Control for Multi-Domain Bipedal Walking with Underactuation
J. Dyn. Sys., Meas., Control
Surge-Elimination Strategy for Aero-Engine Transient Control
J. Dyn. Sys., Meas., Control (July 2024)
Safe Reinforcement Learning-Based Balance Control for Multi-Cylinder Hydraulic Press
J. Dyn. Sys., Meas., Control (July 2024)
Related Articles
Parametrically Excited Electrostatic MEMS Cantilever Beam With Flexible Support
J. Vib. Acoust (April,2017)
Reduced Order Model Analysis of Frequency Response of Alternating Current Near Half Natural Frequency Electrostatically Actuated MEMS Cantilevers
J. Comput. Nonlinear Dynam (July,2013)
Related Proceedings Papers
Related Chapters
Nanomechanical Cantilever Biosensors: Conceptual Design, Recent Developments, and Practical Implementation
Biomedical Applications of Vibration and Acoustics in Therapy, Bioeffect and Modeling
Semi-Analytical Model of the Pull-In Behavior of an Electrostatically Actuated Cantilever Microbeam
International Conference on Mechanical and Electrical Technology, 3rd, (ICMET-China 2011), Volumes 1–3
Graphical Methods for Control Systems
Introduction to Dynamics and Control in Mechanical Engineering Systems