The tracking performance of piezoelectric nanopositioning stages is vital in many applications, such as scanning probe microscopes (SPMs). Although modified repetitive control (MRC) can improve tracking performance for commonly used periodic reference input, it is sensitive to unexpected disturbances that deteriorate tracking precision, especially for high-speed motion. In order to achieve high-speed and precision motion, in this paper, a new composite control scheme by integrating MRC with disturbance observer (DOB) is developed. To simplify controller implementation, the hysteresis nonlinearity is treated as external disturbance and the proposed method is designed in frequency domain. The stability and robust stability are analyzed, and an optimization procedure to calculate the controller parameters is employed to enhance the performance to the maximum extent. To validate the effectiveness of the proposed method, comparative experiments are performed on a piezoelectric nanopositioning stage. Experimental results indicate that the hysteresis is suppressed effectively and the proposed method achieves high-speed and precision tracking with triangular waves references up to 25 Hz and improves the disturbance rejection ability with disturbances under different frequencies and robustness to model uncertainty through comparing with feedback controllers and MRC, respectively.
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August 2019
Research-Article
Integrated Modified Repetitive Control With Disturbance Observer of Piezoelectric Nanopositioning Stages for High-Speed and Precision Motion
Zhao Feng,
Zhao Feng
School of Power and Mechanical Engineering,
Wuhan University,
Wuhan 430072, China
e-mail: fengzhaozhao7@whu.edu.cn
Wuhan University,
Wuhan 430072, China
e-mail: fengzhaozhao7@whu.edu.cn
Search for other works by this author on:
Jie Ling,
Jie Ling
School of Power and Mechanical Engineering,
Wuhan University,
Wuhan 430072, China
e-mail: jamesling@whu.edu.cn
Wuhan University,
Wuhan 430072, China
e-mail: jamesling@whu.edu.cn
Search for other works by this author on:
Min Ming,
Min Ming
School of Power and Mechanical Engineering,
Wuhan University,
Wuhan 430072, China
e-mail: mingmin_whu@whu.edu.cn
Wuhan University,
Wuhan 430072, China
e-mail: mingmin_whu@whu.edu.cn
Search for other works by this author on:
Xiaohui Xiao
Xiaohui Xiao
School of Power and Mechanical Engineering,
Wuhan University,
Wuhan 430072, China;
Wuhan University,
Wuhan 430072, China;
1Corresponding author.
Search for other works by this author on:
Zhao Feng
School of Power and Mechanical Engineering,
Wuhan University,
Wuhan 430072, China
e-mail: fengzhaozhao7@whu.edu.cn
Wuhan University,
Wuhan 430072, China
e-mail: fengzhaozhao7@whu.edu.cn
Jie Ling
School of Power and Mechanical Engineering,
Wuhan University,
Wuhan 430072, China
e-mail: jamesling@whu.edu.cn
Wuhan University,
Wuhan 430072, China
e-mail: jamesling@whu.edu.cn
Min Ming
School of Power and Mechanical Engineering,
Wuhan University,
Wuhan 430072, China
e-mail: mingmin_whu@whu.edu.cn
Wuhan University,
Wuhan 430072, China
e-mail: mingmin_whu@whu.edu.cn
Xiaohui Xiao
School of Power and Mechanical Engineering,
Wuhan University,
Wuhan 430072, China;
Wuhan University,
Wuhan 430072, China;
1Corresponding author.
Contributed by the Dynamic Systems Division of ASME for publication in the JOURNAL OF DYNAMIC SYSTEMS, MEASUREMENT,AND CONTROL. Manuscript received January 14, 2018; final manuscript received January 31, 2019; published online March 25, 2019. Assoc. Editor: Srinivasa M. Salapaka.
J. Dyn. Sys., Meas., Control. Aug 2019, 141(8): 081006 (10 pages)
Published Online: March 25, 2019
Article history
Received:
January 14, 2018
Revised:
January 31, 2019
Citation
Feng, Z., Ling, J., Ming, M., and Xiao, X. (March 25, 2019). "Integrated Modified Repetitive Control With Disturbance Observer of Piezoelectric Nanopositioning Stages for High-Speed and Precision Motion." ASME. J. Dyn. Sys., Meas., Control. August 2019; 141(8): 081006. https://doi.org/10.1115/1.4042879
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