In this paper, we explore parametric amplification of multiple resonances in multidegree-of-freedom mechanical systems, and the use of frequency sweeping with a parametric pump to amplify several adjacent resonance peaks. We develop conditions under which it is possible to sweep with direct and parametric excitation to produce a sweep response with amplified effective quality factors for all resonances over a given frequency range. We determine gain and stability conditions and include analysis for potential problematic modal interactions. This technique makes it possible to improve the measurements of resonance locations in devices, for example, sensors that rely on tracking shifts in resonance peaks. The results are demonstrated on a model for a multi-analyte micro-electromechanical systems mass sensor.

References

1.
DeMartini
,
B. E.
,
Rhoads
,
J. F.
,
Shaw
,
S. W.
, and
Turner
,
K. L.
, 2007, “
A Single Input-Single Output Mass Sensor Based on a Coupled Array of Microresonators
,”
Sens. Actuators, A
,
137
, pp.
147
156
.
2.
Burg
,
T. P.
,
Mirza
,
A. R.
,
Milovic
,
N.
,
Tsau
,
C. H.
,
Popescu
,
G. A.
,
Foster
,
J. S.
, and
Manalis
,
S. R.
, 2006, “
Vacuum-Packages Suspended Microchannel Resonant Mass Sensor for Biomolecular Detection
,”
J. Microelectromech. Syst.
,
15
, pp.
1466
1476
.
3.
Tamayo
,
J.
,
Humphris
,
A. D. L.
,
Malloy
,
A. M.
, and
Miles
,
M. J.
, 2001, “
Chemical Sensors and Biosensors in Liquid Environment Based on Microcantilevers With Amplified Quality Factor
,”
Ultramicroscopy
,
86
, pp.
167
173
.
4.
Zhang
,
W.
, and
Turner
,
K. L.
, 2004, “
A Mass Sensor Based on Parametric Resonance
,”
Proceedings of the Solid State Sensor, Actuator and Microsystem Workshop
,
Hilton Head, SC
.
5.
Waggoner
,
P. S.
, and
Craighead
,
H. G.
, 2007, “
Micro- and Nanomechanical Sensors for Environmental, Chemical, and Biological Detection
,”
Lab Chip
,
7
, pp.
1238
1255
.
6.
Miller
,
N. J.
, and
Shaw
,
S. W.
, 2008, “
Frequency Sweeping With Concurrent Parametric Amplification
,”
ASME Dynamic Systems and Control Conference
, Oct. 20–22,
Ann Arbor, MI
.
7.
Ekinci
,
K. L.
,
Yang
,
Y. T.
, and
Roukes
,
M. L.
, 2004, “
Ultimate Limits to Inertial Mass Sensing Based Upon Nanoelectromechanical Systems
,”
J. Appl. Phys.
,
95
, pp.
2682
2689
.
8.
Ekinci
,
K. L.
,
Huang
,
X. M. H.
, and
Roukes
,
M. L.
, 2004, “
Ultrasensitive Nanoelectromechanical Mass Detection
,”
App. Phys. Lett.
,
84
,
p
. 4469.
9.
Vignola
,
J. F.
,
Judge
,
J. A.
,
Jarzynski
,
J.
,
Zalalutdinov
,
M.
,
Houston
,
B. H.
, and
Baldwin
,
J. W.
, 2006, “
Effect of Viscous Loss on Mechanical Resonators Designed for Mass Detection
,”
App. Phys. Lett.
,
88
,
041921
.
10.
Mertz
,
J.
,
Marti
,
O.
, and
Mlynek
,
J.
, 1993, “
Regulation of a Microcantilever Response by Force Feedback
,”
App. Phys. Lett.
,
62
, pp.
2344
2346
.
11.
Bradely
,
C.
,
Daqaq
,
M. F.
,
Bibo
,
A.
, and
Jalili
,
N.
, 2010, “
Sensitivity Enhancement of Cantilever-Based Sensors Using Feedback Delays
,”
ASME J. Comput. Nonlinear Dyn.
,
5
,
041014
.
12.
Meerkov
,
S. M.
, 1980, “
Principle of Vibrational Control: Theory and Applications
,”
IEEE Trans. Autom. Control
,
AC-25
, pp.
755
762
.
13.
Howson
,
D. P.
, and
Smith
,
R. B.
, 1970,
Parametric Amplifiers
,
McGraw-Hill
,
London
.
14.
Louisell
,
W. H.
, 1960,
Coupled Mode and Parametric Electronics
,
John Wiley & Sons
,
New York.
15.
Rugar
,
D.
, and
Grutter
,
P.
, 1991, “
Mechanical Parametric Amplification and Thermomechanical Noise Squeezing
,”
Phys. Rev. Lett.
,
67
, pp.
699
702
.
16.
Olkhovets
,
A.
,
Carr
,
D. W.
,
Parpia
,
J. M.
, and
Craighead
,
H. G.
, 2001, “
Non-Degenerate Nanomechanical Parametric Amplifier
,”
The 14th IEEE International Conference on Micro Electro Mechanical Systems
, pp.
298
300
.
17.
Rhoads
,
J. F.
,
Shaw
,
S. W.
,
Turner
,
K. L.
,
Moehlis
,
J.
,
DeMartini
,
B. E.
, and
Zhang
,
W.
, 2006, “
Generalized Parametric Resonance in Electrostatically Actuated Microelectromechanical Oscillators
,”
J. Sound Vib.
,
296
, pp.
797
829
.
18.
Gallacher
,
B. J.
,
Burdess
,
J. S.
,
Harris
,
A. J.
, and
Harish
,
K. M.
, 2005, “
Active Damping Control in MEMS Using Parametric Pumping
,”
NSTI-Nanotech.
,
3
, pp.
383
386
.
19.
Baumgartner
,
R. A.
, and
Byer
,
R. L.
, 1979, “
Optical Parametric Amplification
,”
IEEE J. Quantum Electron.
,
QE-15
, pp.
432
444
.
20.
Napoli
,
M.
,
Bamieh
,
B.
, and
Turner
,
K.
, 2004, “
A Capacitive Microcantilever: Modeling, Validation, and Estimation Using Current Measurements
,”
ASME J. Dyn. Syst., Meas., Control
,
126
, pp.
319
326
.
21.
Rhoads
,
J. F.
,
Miller
,
N. J.
,
Shaw
,
S. W.
, and
Feeny
,
B. F.
, 2008, “
Mechanical Domain Parametric Amplification
,”
J. Vib. Acoust.
,
130
,
061006
.
22.
Rhoads
,
J. F.
, and
Shaw
,
S. W.
, 2010, “
Impact of Nonlinearity on Degenerate Parametric Amplifiers
,”
App. Phys. Lett.
,
96
,
234101
.
23.
Yie
,
Z.
,
Turner
,
K.
,
Miller
,
N. J.
, and
Shaw
,
S.
, 2010, “
Sensitivity Enhancement Using Parametric Amplification in a Resonant Sensing Array
,”
Proceedings of the 13th Hilton Head Solid State Sensors and Actuators Conference
, June 6–10, SC.
24.
Turner
,
K. L.
,
Miller
,
S. A.
,
Hartwell
,
P. G.
,
MacDonald
,
N. C.
,
Strogatz
,
S. H.
, and
Adams
,
S. G.
, 1998, “
Five Parametric Resonances in a Microelectromechanical System
,”
Nature
(London),
396
, pp.
149
152
.
25.
Hsu
,
C. S.
, 1963, “
On the Parametric Excitation of a Dynamic System Having Multiple Degrees of Freedom
,”
J. Appl. Mech.
,
30
, pp.
367
372
.
26.
Nayfeh
,
A. H.
, and
Mook
,
D. T.
, 1979,
Nonlinear Oscillations
,
John Wiley & Sons
,
New York.
27.
Miller
,
N. J.
, 2007, “Mechanical Domain Parametric Amplification in Multiple-Degree-of-Freedom Systems,” M.S. thesis, Michigan State University, East Lansing, MI.
28.
Spletzer
,
M.
,
Raman
,
A.
,
Reifenberger
,
R.
,
Wu
,
A. Q.
, and
Xu
,
X.
, 2006, “
Ultrasensitive Mass Sensing Using Mode Localization in Coupled Microcantilevers
,”
Proceedings of the International Workshop on Nanomechanical Sensors
,
Denmark
.
29.
Antsaklis
,
P. J.
, and
Michel
,
A. N.
, 1997,
Linear Systems
,
Birkhauser
,
Boston
.
You do not currently have access to this content.