Due to the compact layout, manufacturing tolerance, modeling errors, and environmental changes, microelectromechanical systems (MEMSs) are subjected to parasitics and parameter variations. In order to better guarantee their stability and a certain level of performance, one must take into account these factors in the design of MEMS control systems. This work presents two robust control laws for a parallel-plate electrostatic microactuator in the presence of uncertainties. The dynamical model of the system, including parallel and serial parasitics, is firstly established and two control schemes, both based on input-to-state stabilization and robust backstepping, are proposed. The stability and the performance of the system using these control schemes are demonstrated through both stability analysis and numerical simulation.
Modeling and Control of Electrostatically Actuated MEMS in the Presence of Parasitics and Parametric Uncertainties
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Zhu, G., Penet, J., and Saydy, L. (February 5, 2007). "Modeling and Control of Electrostatically Actuated MEMS in the Presence of Parasitics and Parametric Uncertainties." ASME. J. Dyn. Sys., Meas., Control. November 2007; 129(6): 786–794. https://doi.org/10.1115/1.2789469
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