Micromachining was performed in polymethylmethacrylate (PMMA) using X-ray lithography for the fabrication of miniaturized devices (microchips) for potential applications in chemical and genetic analyses. The devices were fabricated using two different techniques: transfer mask technology and a Kapton® mask. For both processes, the channel topography was transferred (1:1) to the appropriate substrate via the use of an optical mask. In the case of the transfer mask technique, the PMMA substrate was coated with a positive photoresist and a thin Au/Cr plating base. Following UV exposure, the resist was developed and a thick overlayer (∼3 μm) of Au electroplated onto the PMMA substrate only where the resist was removed, which acted as an absorber of the X-rays. In the other technique, a Kapton® film was used as the X-ray mask. In this case, the Kapton® film was UV exposed using the optical mask to define the channel topography and following development of the resist, a thick Au overlayer (8 μm) was electrodeposited onto the Kapton® sheet. The PMMA wafer during X-ray exposure was situated directly underneath the Kapton® mask. In both cases, the PMMA wafer was exposed to soft X-rays and developed to remove the exposed PMMA. The resulting channels were found to be 20 μm in width (determined by optical mask) with channel depths of ∼50 μm (determined by x-ray exposure time). In order to demonstrate the utility of this micromachining process, several components were fabricated in PMMA including capillary/chip connectors, injectors for fixed-volume sample introduction, separation channels for electrophoresis and integrated fiber optic fluorescence detectors. These components could be integrated into a single device to assemble a system appropriate for the rapid analysis of various targets.
Skip Nav Destination
Article navigation
February 1999
Special Papers On Microsystems Technology In Medicine And Biology
Micromachining in Plastics Using X-Ray Lithography for the Fabrication of Micro-Electrophoresis Devices
S. M. Ford,
S. M. Ford
Department of Chemistry, Louisiana State University, Baton Rouge, LA 70803-1804
Search for other works by this author on:
J. Davies,
J. Davies
Department of Chemistry, Louisiana State University, Baton Rouge, LA 70803-1804
Search for other works by this author on:
B. Kar,
B. Kar
Department of Chemistry, Louisiana State University, Baton Rouge, LA 70803-1804
Search for other works by this author on:
S. D. Qi,
S. D. Qi
Department of Chemistry, Louisiana State University, Baton Rouge, LA 70803-1804
Search for other works by this author on:
S. McWhorter,
S. McWhorter
Department of Chemistry, Louisiana State University, Baton Rouge, LA 70803-1804
Search for other works by this author on:
S. A. Soper,
S. A. Soper
Department of Chemistry, Louisiana State University, Baton Rouge, LA 70803-1804
Search for other works by this author on:
C. K. Malek
C. K. Malek
Center for Advanced Microstructure and Devices, Louisiana State University, Baton Rouge, LA 70810
Search for other works by this author on:
S. M. Ford
Department of Chemistry, Louisiana State University, Baton Rouge, LA 70803-1804
J. Davies
Department of Chemistry, Louisiana State University, Baton Rouge, LA 70803-1804
B. Kar
Department of Chemistry, Louisiana State University, Baton Rouge, LA 70803-1804
S. D. Qi
Department of Chemistry, Louisiana State University, Baton Rouge, LA 70803-1804
S. McWhorter
Department of Chemistry, Louisiana State University, Baton Rouge, LA 70803-1804
S. A. Soper
Department of Chemistry, Louisiana State University, Baton Rouge, LA 70803-1804
C. K. Malek
Center for Advanced Microstructure and Devices, Louisiana State University, Baton Rouge, LA 70810
J Biomech Eng. Feb 1999, 121(1): 13-21 (9 pages)
Published Online: February 1, 1999
Article history
Received:
June 14, 1998
Revised:
October 1, 1998
Online:
October 30, 2007
Citation
Ford, S. M., Davies, J., Kar, B., Qi, S. D., McWhorter, S., Soper, S. A., and Malek, C. K. (February 1, 1999). "Micromachining in Plastics Using X-Ray Lithography for the Fabrication of Micro-Electrophoresis Devices." ASME. J Biomech Eng. February 1999; 121(1): 13–21. https://doi.org/10.1115/1.2798035
Download citation file:
Get Email Alerts
Aged Tendons Exhibit Altered Mechanisms of Strain-Dependent Extracellular Matrix Remodeling
J Biomech Eng (July 2024)
Influence of Breath-Mimicking Ventilated Incubation on Three-Dimensional Bioprinted Respiratory Tissue Scaffolds
J Biomech Eng (September 2024)
Related Articles
PCR Microchip Array Based on Polymer Bonding Technique
J. Electron. Packag (March,2005)
Design and Fabrication of Microelectromechanical Systems
J. Mech. Des (December,1994)
Constrained Layer Damping Treatments for Microstructures
J. Vib. Acoust (October,2002)
Integrated Double-Sided Neural Sensor With Dry-Etch BCB
J. Nanotechnol. Eng. Med (May,2010)
Related Proceedings Papers
Related Chapters
Development of New Process and Product Monitoring Technologies for the Manufacturing of High Value Alloy Steels for Use in Critical Applications
Bearing and Transmission Steels Technology
Fabrication of MSM UV Detector Using ZnO Nanowires
International Conference on Computer and Electrical Engineering 4th (ICCEE 2011)
Surface Analysis and Tools
Tribology of Mechanical Systems: A Guide to Present and Future Technologies