A summary of recent research in micropositioning and nanopositioning is presented. The work is classified into five groups by actuation approach, including piezoelectric, magnetic, electrostatic, thermal, and electrochemical microactuators. A consistent set of measurable, key characteristics are proposed: degrees of freedom, range, resolution, range-to-resolution ratio, footprint, force, natural frequency, and bandwidth. Values of the key characteristics are listed in tables. The results demonstrate the boundaries of current knowledge and the advantages of each actuation approach. This is the first time this information has been compiled in this growing field and it is summarized in such a way as to be useful to readers. There are 82 references cited in this review article.
Issue Section:
Review Articles
1.
Golda
, D.
, and Culpepper
, M. L.
, 2004, “Small-Scale Micro/Nano-Manipulators in Precision Alignment and Positioning
,” Proc. Am. Soc. Precis Eng.
, Orlando, FL, Oct., pp. 297
–299
.2.
Slocum
, A. H.
, 1992, Precision Machine Design
, Society of Manufacturing Engineers
, Dearborn, MI.3.
Cheung
, P.
, Horowitz
, R.
, and Howe
, R. T.
, 1996, “Design, Fabrication, Position Sensing, and Control of an Electrostatically-Driven Polysilicon Microactuator
,” IEEE Trans. Magn.
0018-9464, 32
(1
), pp. 122
–128
.4.
Hirano
, T.
, Fan
, L.-S.
, Gao
, J. Q.
, and Lee
, W. Y.
, 1998, “MEMS Milliactuator for Hard-Disk-Drive Tracking Servo
,” J. Microelectromech. Syst.
1057-7157, 7
(2
), pp. 149
–155
.5.
Hirano
, T.
, Fan
, L.-S.
, Lee
, W. Y.
, Hong
, J.
, Imaino
, W.
, Pattanaik
, S.
, Chan
, S.
, Webb
, P.
, Horowitz
, R.
, Aggarwal
, S.
, and Horsley
, D. A.
, 1998, “High-Bandwidth High-Accuracy Rotary Microactuators for Magnetic Hard Disk Drive Tracking Servos
,” IEEE/ASME Trans. Mechatron.
1083-4435, 3
(3
), pp. 156
–165
.6.
Hirano
, T.
, Fan
, L.-S.
, Semba
, T.
, Lee
, W. Y.
, Hong
, J.
, Pattanaik
, S.
, Webb
, P.
, Juan
, W.-H.
, and Chan
, S.
, 1999, “High-Bandwidth HDD Tracking Servo by a Moving-Slider Micro-Actuator
,” IEEE Trans. Magn.
0018-9464, 35
(5
), pp. 3670
–3672
.7.
Horsley
, D. A.
, Wongkomet
, N.
, Horowitz
, R.
, and Pisano
, A. P.
, 1999, “Precision Positioning Using a Microfabricated Electrostatic Actuator
,” IEEE Trans. Magn.
0018-9464, 35
(2
), pp. 993
–999
.8.
Imamura
, T.
, Katayama
, M.
, Ikegawa
, Y.
, Ohwe
, T.
, Koishi
, R.
, and Koshikawa
, T.
, 1998, “MEMS-Based Integrated Head/Actuator/Slider for Hard Disk Drives
,” IEEE/ASME Trans. Mechatron.
1083-4435, 3
(3
), pp. 166
–174
.9.
Kim
, B.-H.
, and Chun
, K.
, 2001, “Fabrication of an Electrostatic Track-Following Micro Actuator for Hard Disk Drives Using SOI Wafer
,” J. Micromech. Microeng.
0960-1317, 11
(1
), pp. 1
–6
.10.
Soeno
, Y.
, Ichikawa
, S.
, Tsuna
, T.
, Sato
, Y.
, and Sato
, I.
, 1999, “Piezoelectric Piggy-Back Microactuator for Hard Disk Drive
,” IEEE Trans. Magn.
0018-9464, 35
(2
), pp. 983
–987
.11.
Toshiyoshi
, H.
, Mita
, M.
, and Fujita
, H.
, 2002, “A MEMS Piggyback Actuator for Hard-Disk Drives
,” J. Microelectromech. Syst.
1057-7157,11
(6
), pp. 648
–654
.12.
Wang
, Z. H.
, Zhu
, W. G.
, and Yao
, X.
, 2002, “d(31) Type Inplane Bending Multilayer Piezoelectric Microactuators—A Design Concept and Its Applications
,” Sens. Actuators, A
0924-4247, A101
(3
), pp. 262
–268
.13.
Cusin
, P.
, Sawai
, T.
, and Konishi
, S.
, 2000, “Compact and Precise Positioner Based on the Inchworm Principle
,” J. Micromech. Microeng.
0960-1317, 10
(4
), pp. 516
–521
.14.
Gao
, P.
, Tan
, H.
, and Yuan
, Z. J.
, 2000, “The Design and Characterization of Piezo-Driven UltraPrecision Stepping Positioner
,” Meas. Sci. Technol.
0957-0233, 11
(2
) pp. N15
–N19
.15.
Ku
, S.-S.
, Pinsopon
, U.
, Cetinkunt
, S.
, and Nakajima
, S.
, 2000, “Design, Fabrication, and Real-Time Neural Network Control of a Three-Degrees-of-Freedom Nanopositioner
,” IEEE/ASME Trans. Mechatron.
1083-4435, 5
(3
), pp. 273
–280
.16.
Gao
, P.
, and Swei
, S.-M.
, 1999, “A Six-Degree-of-Freedom Micro-Manipulator Based on Piezoelectric Translators
,” Nanotechnology
0957-4484, 10
(4
), pp. 447
–452
.17.
Jonsmann
, J.
, Sigmund
, O.
, and Bouwstra
, S.
, 1999, “Compliant Electro-Thermal Microactuators
,” Proc. IEEE Micro Electro Mech. Syst.
, pp. 588
–593
.18.
Jung
, K. S.
, and Baek
, Y. S.
, 2002, “Contact-Free Moving-Magnet Type of Micropositioner With Optimized Specification
,” IEEE Trans. Magn.
0018-9464, 38
(3
), pp. 1539
–1548
.19.
Kwon
, H. N.
, and Lee
, J. H.
, 2002, “Characterization of a Micromachined Inchworm Motor With Thermoelastic Linkage Actuators
, Proc. IEEE Micro Electro Mech. Syst.
, pp. 586
–589
.20.
Liu
, Y.-T.
, and Higuchi
, T.
, 2001, “Precision Positioning Device Utilizing Impact Force of Combined Piezo-Pneumatic Actuator
,” IEEE/ASME Trans. Mechatron.
1083-4435, 6
(4
), pp. 467
–473
.21.
Sun
, Y.
, Piyabongkarn
, D.
, Sezen
, A.
, Nelson
, B. J.
, and Rajamani
, R.
, 2002, “A High-Aspect-Ratio Two-Axis Electrostatic Microactuator With Extended Travel Range
,” Sens. Actuators, A
0924-4247, A102
(1–2
), pp. 49
–60
.22.
Chang
, S. H.
, Tseng
, C. K.
, and Chien
, H. C.
, 1999, “An Ultra-Precision XYθz Piezo-Micropositioner Part I: Design and Analysis
,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control
0885-3010, 46
(4
), pp. 897
–905
.23.
Chang
, S. H.
, Tseng
, C. K.
, and Chien
, H. C.
, 1999, “An Ultra-Precision XYθz Piezo-Micropositioner Part II: Experiment and Performance
,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control
0885-3010, 46
(4
), pp. 906
–912
.24.
Lee
, C.-W.
, and Kim
, S.-W.
, 1997, “An Ultraprecision Stage for Alignment of Wafers in Advanced Microlithography
,” Precis. Eng.
0141-6359, 21
(2–3
), pp. 113
–122
.25.
Liu
, H. Z.
, Lu
, B. H.
, Ding
, Y. C.
, Tang
, Y. P.
, and Li
, D. C.
, 2003, “A Motor-Piezo Actuator for Nano-Scale Positioning Based on Dual Servo Loop and Nonlinearity Compensation
,” J. Micromech. Microeng.
0960-1317, 13
(2
), pp. 295
–299
.26.
Mohamed
, A. M.
, Vestgaard
, B.
, and Busch-Vishniac
, I.
, 1994, “Real Time Implementation of a Robust H∞ Controller for a 2-DOF Magnetic Micro-Levitation Positioner
,” Proc. Am. Control. Conf.
, Vol. 3
, pp. 3219
–3223
.27.
Pahk
, H. J.
, Lee
, D. S.
, and Park
, J. H.
, 2001, “Ultra Precision Positioning System for Servo Motor-Piezo Actuator Using the Dual Servo Loop and Digital Filter Implementation
,” Int. J. Mach. Tools Manuf.
0890-6955, 41
(1
), pp. 51
–63
.28.
Yang
, R.
, Jouaneh
, M.
, and Schweizer
, R.
, 1996, “Design and Characterization of a Low-Profile Micropositioning Stage
,” Precis. Eng.
0141-6359, 18
(1
), pp. 20
–29
.29.
Ni
, J.
, and Zhu
, Z.
, 2000, “Design of a Linear Piezomotor With Ultra-High Stiffness and Nanoprecision
,” IEEE/ASME Trans. Mechatron.
1083-4435, 5
(4
), pp. 441
–443
.30.
Zhang
, B.
, and Zhu
, Z.
, 1997, “Developing a Linear Piezomotor With Nanometer Resolution and High Stiffness
,” IEEE/ASME Trans. Mechatron.
1083-4435, 2
(1
), pp. 22
–29
.31.
Chang
, S. H.
, and Du
, B. C.
, 1998, “A Precision Piezodriven Micropositioner Mechanism With Large Travel Range
,” Rev. Sci. Instrum.
0034-6748, 69
(4
), pp. 1785
–1791
.32.
Scire
, F. E.
, and Teague
, E. C.
, 1978, “Piezodriven 50‐μm Range Stage With Subnanometer Resolution
,” Rev. Sci. Instrum.
0034-6748, 49
(12
), pp. 1735
–1740
.33.
Jaecklin
, V. P.
, Linder
, C.
, de Rooij
, N. F.
, and Moret
, J.-M.
, 1993, “Comb Actuators for XY-Microstages
,” Sens. Actuators, A
0924-4247, A39
(1
), 83
–89
.34.
Chen
, K. S.
, Trumper
, D. L.
, and Smith
, S. T.
, 2002, “Design and Control for an Electromagnetically Driven X‐Y‐θ Stage
,” Precis. Eng.
0141-6359, 26
(4
), pp. 355
–369
.35.
Judy
, J. W.
, Polla
, D. L.
, and Robbins
, W. P.
, 1990, “A Linear Piezoelectric Stepper Motor With Submicrometer Step Size and Centimeter Travel Range
,” IEEE Trans. Ultrason. Ferroelectr. Freq. Control
0885-3010, 37
(5
), pp. 428
–437
.36.
Xu
, Y.
, Miller
, S. A.
, and MacDonald
, N. C.
, 1995, “Microelectromechanical Scanning Tunneling Microscope
,” Proc. Int. Conf. Solid State Sensors Actuators
, Vol. 1
, pp. 640
–643
.37.
Gao
, P.
, Swei
, S.-M.
, and Yuan
, Z.
, 1999, “A New Piezodriven Precision Micropositioning Stage Utilizing Flexure Hinges
,” Nanotechnology
0957-4484, 10
(4
), pp. 394
–398
.38.
Hoen
, S.
, Bai
, Q.
, Harley
, J. A.
, Horsley
, D. A.
, Matta
, F.
, Verhoeven
, T.
, Williams
, J.
, and Williams
, K. R.
, 2003, “A High-Performance Dipole Surface Drive for Large Travel and Force
,” Proc. Int. Conf. Solid State Sensors Actuators
, Vol. 1
, pp. 344
–347
.39.
Rothuizen
, H.
Despont
, M.
, Drechsler
, U.
, Genolet
, G.
, Häberle
, W.
, Lutwyche
, M.
, Stutz
, R.
, and Vettiger
, P.
, 2002, “Compact Copper/Epoxy-Based Electromagnetic Scanner for Scanning Probe Applications
,” Proc. IEEE Micro Electro Mech. Syst.
, pp. 582
–585
.40.
Smith
, S. T.
, Chetwynd
, D. G.
, and Harb
, S.
, 1994, “A Simple Two-Axis Ultraprecision Actuator
,” Rev. Sci. Instrum.
0034-6748, 65
(4
), pp. 910
–917
.41.
Chu
, L. L.
, and Gianchandani
, Y. B.
, 2003, “A Micromachined 2D Positioner With Electrothermal Actuation and Sub-Nanometer Capacitive Sensing
,” J. Micromech. Microeng.
0960-1317, 13
(2
), pp. 279
–285
.42.
Jang
, W. I.
, Choi
, C. A.
, Lee
, M. L.
, Jun
, C. H.
, and Kim
, Y. T.
, 2002, “Fabrication of MEMS Devices by Using Anhydrous HF Gas-Phase Etching With Alcoholic Vapor
,” J. Micromech. Microeng.
0960-1317, 12
(3
), pp. 297
–306
.43.
Shen
, S.-C.
, Pan
, C.-T.
, and Chou
, H.-P.
, 2002, “Electromagnetic Optical Switch for Optical Network Communication
,” J. Magn. Magn. Mater.
0304-8853, 239
(1–3
), pp. 610
–613
.44.
Chen
, S.
, and Culpepper
, M. L.
, 2004, “Compliant Mechanisms for Micro-Scale Spatial Manipulators: Applications in Nanomanipulation
,” Proc. Am. Soc. Precis. Eng.
, Orlando, FL, Oct., pp. 293
–296
.45.
Culpepper
, M. L.
, and Anderson
, G.
, 2004, “Design of a Low-Cost Nano-Manipulator Which Utilizes a Monolithic, Spatial Compliant Mechanism
,” Precis. Eng.
0141-6359, 28
(4
), pp. 469
–482
.46.
Culpepper
, M. L.
, and Chen
, S.
, 2003, “Design of Precision Manipulators Using Binary Actuation and Differential Compliant Mechanisms
,” Proc. Am. Soc. Precis. Eng.
Portland, OR, Oct., pp. 279
–282
.47.
Reid
, P. R.
, Bright
, V. M.
, and Comtois
, J. H.
, 1996, “Force Measurements of Polysilicon Thermal Microactuators
,” Proc. SPIE
0277-786X, 2882
, pp. 296
–306
.48.
Manzardo
, O.
, Herzig
, H. P.
, Marxer
, C. R.
, and de Rooij
, N. F.
, 1999, “Miniaturized Time-Scanning Fourier Transform Spectrometer Based on Silicon Technology
,” Opt. Lett.
0146-9592, 24
(23
), pp. 1705
–1707
.49.
Syms
, R. R. A.
, 2002, “Long-Travel Electrothermally Driven Resonant Cantilever Microactuators
,” J. Micromech. Microeng.
0960-1317, 12
(3
), pp. 211
–218
.50.
Li
, W.
, Zhao
, X.
, Cai
, B.
, Zhou
, G.
, and Zhang
, M.
, 2001, “Magnetically Actuated MEMS Variable Optical Attenuator
,” Proc. SPIE
0277-786X, 4601
, pp. 89
–96
.51.
McConaghy
, C. F.
, Lee
, A. P.
, Sommargren
, G.
, Phillion
, D.
, Campbell
, E. W.
, and Trevino
, J.
, 1998, “Micromechanical Actuator With Capacitive Position Correction for Phase Shifting Diffraction Interferometry
,” Proc. ASME Micro-Electro-Mech. Syst.
, pp. 461
–468
.52.
Fan
, L.
, Wu
, M. C.
, Choquette
, K. D.
, and Crawford
, M. H.
, 1997, “Self-Assembled Microactuated XYZ Stages for Optical Scanning and Alignment
,” Proc. Int. Conf. Solid State Sensors Actuators
, Vol. 1
, pp. 319
–322
.53.
Kim
, C.-H.
, and Kim
, Y.-K.
, 2002, “Micro XY-Stage Using Silicon on a Glass Substrate
,” J. Micromech. Microeng.
0960-1317, 12
(2
), pp. 103
–107
.54.
Cragun
, R.
, and Howell
, L. L.
, 1999, “Linear Thermomechanical Microactuators
,” Proc. ASME Micro Electro Mech. Syst.
, pp. 181
–188
.55.
Guckel
, H.
, Fischer
, K.
, and Stiers
, E.
, 1998, “Closed Loop Controlled, Large Throw, Magnetic Linear Microactuator With 1000μm Structural Height
,” Proc. IEEE Micro Electro Mech. Syst.
, pp. 414
–418
.56.
Guckel
, H.
, Klein
, J.
, Christenson
, T.
, Skrobis
, K.
, Laudon
, M.
, and Lovell
, E. G.
, 1992, “Thermomagnetic Metal Flexure Actuators
,” Technical Digest—IEEE Solid-State Sensor Actuator Workshop, pp. 73
–75
.57.
Li
, J.
, Brenner
, M. P.
, Lang
, J. H.
, Slocum
, A. H.
, and Struempler
, R.
, 2003, “DRIE-Fabricated Curved-Electrode Zipping Actuators With Low Pull-in Voltage
,” Proc. Int. Conf. Solid-State Sensors Actuators
, Vol. 1
, pp. 480
–483
.58.
Lott
, C. D.
, McLain
, T. W.
, Harb
, J. N.
, and Howell
, L. L.
, 2002, “Modeling the Thermal Behavior of a Surface-Micromachined Linear-Displacement Thermomechanical Microactuator
,” Sens. Actuators, A
0924-4247, A101
(1–2
), pp. 239
–250
.59.
de Bhailis
, D.
, Murray
, C.
, Duffy
, M.
, Alderman
, J.
, Kelly
, G.
, and Mathúna
, S. C. O.
, 2000, “Modelling and Analysis of a Magnetic Microactuator
,” Sens. Actuators, A
0924-4247, A81
(1
), pp. 285
–289
.60.
Neagu
, C. R.
, Gardeniers
, J. G. E.
, Elwenspoek
, M.
, and Kelly
, J. J.
, 1996, “An Electrochemical Microactuator: Principle and First Results
,” J. Microelectromech. Syst.
1057-7157, 5
(1
), pp. 2
–9
.61.
Neagu
, C. R.
, Gardeniers
, J. G. E.
, Elwenspoek
, M.
, and Kelly
, J. J.
, 1997, “An Electrochemical Active Valve
,” Electrochim. Acta
0013-4686, 42
(20–22
), pp. 3367
–3373
.62.
Stanczyk
, T.
, Ilic
, B.
, Hesketh
, P. J.
, and Boyd
, J. G. I. V.
, 2000, “A Microfabricated Electrochemical Actuator for Large Displacements
,” J. Microelectromech. Syst.
1057-7157, 9
(3
), pp. 314
–320
.63.
Madou
, M. J.
, 2002, Fundamentals of Microfabrication: The Science of Miniaturization
, 2nd ed., CRC Press
, Boca Raton, FL.64.
Maluf
, N.
, 2000, An Introduction to Microelectromechanical Systems Engineering
, Artech House
, Boston.65.
Jaecklin
, V. P.
, Linder
, C.
, de Rooij
, N. F.
, and Moret
, J.-M.
, 1992, “Micromechanical Comb Actuators With Low Driving Voltage
,” J. Micromech. Microeng.
0960-1317, 2
(4
), pp. 250
–255
.66.
Lee
, C. S. B.
, Han
, S.
, and MacDonald
, N. C.
, 2000, “Single Crystal Silicon (SCS) XY-Stage Fabricated by DRIE and IR Alignment
,” Proc. IEEE Micro Electro Mech. Syst.
, pp. 28
–33
.67.
Comtois
, J. H.
, Michalicek
, M. A.
, and Barron
, C. C.
, 1997, “Characterization of Electrothermal Actuators and Arrays Fabricated in a Four-Level, Planarized Surface-Micromachined, Polycrystalline Silicon Process
,” Proc. Int. Conf. Solid State Sensors Actuators
, Vol. 2
, pp. 769
–772
.68.
Hubbard
, N. B.
, and Howell
, L. L.
, 2004, “Experimental Repeatability of a Thermal Actuator for Nanopositioning
,” Proc. ASME Micro Electro Mech. Syst.
, Paper No. IMECE2004-59616.69.
Oliver
, A. D.
, Vigil
, S. R.
, and Gianchandani
, Y. B.
, 2003, “Photothermal Surface-Micromachined Actuators
,” IEEE Trans. Electron Devices
0018-9383, 50
(4
), pp. 1156
–1157
.70.
Park
, J.-S.
, Chu
, L. L.
, Oliver
, A. D.
, and Gianchandani
, Y. B.
, 2001, “Bent-Beam Electrothermal Actuators—Part II: Linear and Rotary Microengines
,” J. Microelectromech. Syst.
1057-7157, 10
(2
), pp. 255
–262
.71.
Que
, L.
, Park
, J.-S.
, and Gianchandani
, Y. B.
, 2001, “Bent-Beam Electrothermal Actuators—Part I: Single Beam and Cascaded Devices
,” J. Microelectromech. Syst.
1057-7157, 10
(2
), pp. 247
–254
.72.
Akiyama
, T.
, and Shono
, K.
, 1993, “Controlled Stepwise Motion in Polysilicon Microstructures
,” J. Microelectromech. Syst.
1057-7157, 2
(3
), pp. 106
–110
.73.
Fukuta
, Y.
, Collard
, D.
, Akiyama
, T.
, Yang
, E. H.
, and Fujita
, H.
, 1997, “Microactuated Self-Assembling of 3D Polysilicon Structures With Reshaping Technology
,” Proc. IEEE Micro Electro Mech. Syst.
, pp. 477
–481
.74.
Park
, J.
, Keller
, S.
, Carman
, G. P.
, and Hahn
, H. T.
, 2001, “Development of a Compact Displacement Accumulation Actuator Device for Both Large Force and Large Displacement
,” Sens. Actuators, A
0924-4247, A90
(3
), pp. 191
–202
.75.
Ferreira
, A.
, and Fontaine
, J.-G.
, 2001, “Coarse/Fine Motion Control of a Teleoperated Autonomous Piezoelectric Nanopositioner Operating Under a Microscope
,” Proc. IEEE/ASME Int. Conf. Adv. Intellig. Mechatron.
Vol. 2
, pp. 1313
–1318
.76.
Ferreira
, A.
, and Minotti
, P.
, 1997, “Control of a Multidegree of Freedom Standing Wave Ultrasonic Motor Driven Precise Positioning System
,” Rev. Sci. Instrum.
0034-6748, 68
(4
), pp. 1779
–1786
.77.
Kladitis
, P. E.
, Bright
, V. M.
, Harsh
, K. F.
, and Lee
, Y. E.
, 1999, “Prototype Microrobots for Micro Positioning in a Manufacturing Process and Micro Unmanned Vehicles
,” Proc. IEEE Micro Electro Mech. Syst.
, pp. 570
–575
.78.
Conway
, N. Y.
, and Kim
, S.-G.
, 2004, “Large-Strain, Piezoelectric, In-Plane Micro-Actuator
,” Proc. IEEE Micro Electro Mech. Syst.
, pp. 454
–457
.79.
Hoffmann
, M.
, Leuerer
, T.
, Krüger
, C.
, Böttger
, U.
, Mokwa
, W.
, and Waser
, R.
, 2002, “Fabrication and Characterization of a PZT Thin Flim Actuator for a Micro Electromechanical Switch Application
,” Mater. Res. Soc. Symp. Proc.
0272-9172, 688
, pp. 145
–152
.80.
Lagorce
, L. K.
, Brand
, O.
, and Allen
, M. G.
, 1999, “Magnetic Microactuators Based on Polymer Magnets
,” J. Microelectromech. Syst.
1057-7157, 8
(1
), pp. 2
–9
.81.
Yi
, Y. W.
, and Liu
, C.
, 1999, “Magnetic Actuation of Hinged Microstructures
,” J. Microelectromech. Syst.
1057-7157, 8
(1
), pp. 10
–17
.82.
Franklin
, G. F.
, Powell
, J. D.
, and Emami-Naeini
, A.
, 2002, Feedback Control of Dynamic Systems
, 4th ed., Prentice-Hall
, Upper Saddle River, NJ.Copyright © 2006
by American Society of Mechanical Engineers
You do not currently have access to this content.
