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Keywords: aspect ratioClose
Journal: Journal of Applied Mechanics
Article Type: Research Papers
J. Appl. Mech. September 2009, 76(5): 051008.
Published Online: June 18, 2009
... integrals micro-electro-mechanical systems damping Stokes flow aspect ratio thin beam Newton scheme The field of micro-electro-mechanical systems (MEMSs) is a very broad one that includes fixed or moving microstructures, encompassing micro-electro-mechanical, microfluidic, micro-electro...