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Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 415-420, January 10–13, 2007
Paper No: MNC2007-21181
... for piezoelectric composites fabrication. As an example, micromachined piezoelectric composites with center frequency of 20–50 MHz were prototyped. The micro-piezoelectric composites were characterized showing unprecedented properties for high frequency ultrasound imaging and M/NEMS applications...