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Keywords: Piezoelectric compositesClose
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 415-420, January 10–13, 2007
Paper No: MNC2007-21181
... 11 06 2009 In this paper piezoelectric composites are presented for advanced micro and nano electromechanical devices. The properties of piezoelectric composites (1-3 and 2-2 connectivity) were analyzed and a micromachining process for bulk piezo materials deep etching was developed...