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Proceedings Papers

Fabrication of Nano-Electromechanical Structures Down to 20 nm by Spacer Technology

Xiang Han, Ling Xia, Wengang Wu, Guizhen Yan, Jun Xu, Yilong Hao
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 403-407, January 10–13, 2007
Paper No: MNC2007-21174
DOI: https://doi.org/10.1115/MNC2007-21174
View Paper titled, Fabrication of Nano-Electromechanical Structures Down to 20 nm by Spacer Technology
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Topics: Anisotropy, Cantilever beams, Damage, Density, Dimensions, Electroless plating, Etching, Film thickness, Lithography, Manufacturing
Proceedings Papers

Micro/Nano Piezoelectric Composites for Advanced M/NEMS

Xiaoning Jiang, Jian R. Yuan, An Cheng, Kevin Snook, Wesley Hackenberger
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 415-420, January 10–13, 2007
Paper No: MNC2007-21181
DOI: https://doi.org/10.1115/MNC2007-21181
View Paper titled, Micro/Nano Piezoelectric Composites for Advanced M/NEMS
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Topics: Composite materials, Nanoelectromechanical systems
Proceedings Papers

Modeling Gaseous Flows Through Micro- and Nano-Channels

Hongwei Sun, Mohammad Faghri
Proc. ASME. MNC2007, First International Conference on Integration and Commercialization of Micro and Nanosystems, Parts A and B, 1043-1049, January 10–13, 2007
Paper No: MNC2007-21302
DOI: https://doi.org/10.1115/MNC2007-21302
View Paper titled, Modeling Gaseous Flows Through Micro- and Nano-Channels
Click here to open pdf in another window PDF for Modeling Gaseous Flows Through Micro- and Nano-Channels
Topics: Gas flow, Modeling, Flow (Dynamics), Surface roughness, Friction, Compressibility, Microchannel flow, Microelectromechanical systems, Nanoelectromechanical systems, Pressure