In this paper, a MEMS mirror actuated by an electrostatic repulsive force has been proposed and analyzed. The mirror consists of four U-shape springs, a fixed bottom electrode and a movable top electrode, there are many comb fingers on the edges of both electrodes. When the voltage is applied to the top and bottom electrodes, an asymmetric electric field is generated to the top movable fingers and springs, thus a net electrostatic force is produced to move the top plate out of plane. This designed micro-mirror is different from conventional MDM based on electrostatic-attractive-force, which is restricted by one-third thickness of the sacrificial layer for the pull-in phenomenon. The characteristic of this MDM has been analyzed, the result shows that the resonant frequency of the first mode is 8 kHz, and the stroke reaches 10μm at 200V, a MDM with large strokes can be realized for the application of adaptive optics in optical aberrations correction.
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2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems
June 3–5, 2008
Clear Water Bay, Kowloon, Hong Kong
Conference Sponsors:
- Nanotechnology Institute
ISBN:
0-7918-4294-0
PROCEEDINGS PAPER
A New Design of Large Stroke Micro-Deformable Mirror Actuated by Electrostatic Repulsive Force
Fangrong Hu,
Fangrong Hu
Chinese Academy of Sciences, Chengdu, China; Guilin University of Electronics and Technology, Guilin, China
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Jun Yao,
Jun Yao
Chinese Academy of Sciences, Chengdu, China
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Chuankai Qiu,
Chuankai Qiu
Chinese Academy of Sciences, Chengdu, China
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Dajia Wang
Dajia Wang
Chinese Academy of Sciences, Chengdu, China
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Fangrong Hu
Chinese Academy of Sciences, Chengdu, China; Guilin University of Electronics and Technology, Guilin, China
Jun Yao
Chinese Academy of Sciences, Chengdu, China
Chuankai Qiu
Chinese Academy of Sciences, Chengdu, China
Dajia Wang
Chinese Academy of Sciences, Chengdu, China
Paper No:
MicroNano2008-70058, pp. 119-122; 4 pages
Published Online:
June 12, 2009
Citation
Hu, F, Yao, J, Qiu, C, & Wang, D. "A New Design of Large Stroke Micro-Deformable Mirror Actuated by Electrostatic Repulsive Force." Proceedings of the 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems. 2008 Second International Conference on Integration and Commercialization of Micro and Nanosystems. Clear Water Bay, Kowloon, Hong Kong. June 3–5, 2008. pp. 119-122. ASME. https://doi.org/10.1115/MicroNano2008-70058
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