In this paper piezoelectric composites are presented for advanced micro and nano electromechanical devices. The properties of piezoelectric composites (1-3 and 2-2 connectivity) were analyzed and a micromachining process for bulk piezo materials deep etching was developed for piezoelectric composites fabrication. As an example, micromachined piezoelectric composites with center frequency of 20–50 MHz were prototyped. The micro-piezoelectric composites were characterized showing unprecedented properties for high frequency ultrasound imaging and M/NEMS applications.
Volume Subject Area:Micro and Nano Devices
Keywords:Piezoelectric composites, micro/nano composites, PMN-PT single crystal, PC-MUT, ultrasound
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