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Keywords: Triaxis measurementClose
Seiji Aoyagi, Masato Suzuki, Tomokazu Takahashi, Tsutomu Tajikawa, Ken-ichi Saitoh, Shoso Shingubara, Yasuhiko Arai, Hiroyuki Tajiri, Yasuhiro Yoshikawa
Proc. ASME. InterPACK2011, ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, MEMS and NEMS: Volume 1, 429-436, July 6–8, 2011
Publisher: American Society of Mechanical Engineers
Paper No: IPACK2011-52290
... 2012 Ceramic substrate Accelerometer Screen printing BaTiO 3 Magnetoresistive (MR) sensor Triaxis measurement Permalloy plate 1 Copyright © 20xx by ASME Proceedings of the ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic...