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Keywords: Screen printing BaTiO3Close
Seiji Aoyagi, Masato Suzuki, Tomokazu Takahashi, Tsutomu Tajikawa, Ken-ichi Saitoh, Shoso Shingubara, Yasuhiko Arai, Hiroyuki Tajiri, Yasuhiro Yoshikawa
Proc. ASME. InterPACK2011, ASME 2011 Pacific Rim Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Systems, MEMS and NEMS: Volume 1, 429-436, July 6–8, 2011
Paper No: IPACK2011-52290
..., an accelerometer and a magnetoresistive (MR) sensor are focused on, and their fabrications on a ceramic substrate is investigated. The accelerometer utilizes a fringe capacitance formed in a ferroelectric material. For this sensor, in stead of a previously used bulk PZT plate, a screen-printed BaTiO3 (BTO) film...