A through-chip porous Ru-Pt catalyst layer was fabricated on a Si wafer and a novel miniature DMFC (Direct Methanol Fuel Cell) was realized. Recently, we found that porous noble metal layer can be synthesized on Si substrate by immersion plating on a porous Si. In order to realize a DMFC with our novel structure, a porous Ru layer was synthesized on the Si substrate using the immersion plating on the porous Si, then Pt was deposited by galvanic replacement reaction on the porous Ru. The porous Ru-Pt structure showed catalytic activity on methanol oxidization. A through-chip porous Ru-Pt layer was fabricated on a Si wafer by plasma etching and monolithic electrodes with catalyst layers and fuel channels were realized. A preliminary DMFC prototype successfully demonstrated power generation of 2mW/cm2.
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ASME 2009 InterPACK Conference collocated with the ASME 2009 Summer Heat Transfer Conference and the ASME 2009 3rd International Conference on Energy Sustainability
July 19–23, 2009
San Francisco, California, USA
Conference Sponsors:
- Electronic and Photonic Packaging Division
ISBN:
978-0-7918-4359-8
PROCEEDINGS PAPER
Novel Miniature DMFC With Monolithic Si Electrodes
Masanori Hayase,
Masanori Hayase
Tokyo University of Science, Noda, Chiba, Japan
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Yosuke Saito
Yosuke Saito
Tokyo University of Science, Noda, Chiba, Japan
Search for other works by this author on:
Masanori Hayase
Tokyo University of Science, Noda, Chiba, Japan
Yosuke Saito
Tokyo University of Science, Noda, Chiba, Japan
Paper No:
InterPACK2009-89143, pp. 459-462; 4 pages
Published Online:
December 24, 2010
Citation
Hayase, M, & Saito, Y. "Novel Miniature DMFC With Monolithic Si Electrodes." Proceedings of the ASME 2009 InterPACK Conference collocated with the ASME 2009 Summer Heat Transfer Conference and the ASME 2009 3rd International Conference on Energy Sustainability. ASME 2009 InterPACK Conference, Volume 1. San Francisco, California, USA. July 19–23, 2009. pp. 459-462. ASME. https://doi.org/10.1115/InterPACK2009-89143
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