1-20 of 523
Thin films
Close
Save search
Follow your search
Access your saved searches in your account
Would you like to receive an alert when new items match your search?
Close Modal
Sort by
Proceedings Papers

Tension-Tension Fatigue of Copper Thin Films

David T. Read
Proc. ASME. IMECE96, Structural Analysis in Microelectronics and Fiber Optics, 175-180, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-0732
https://doi.org/10.1115/IMECE1996-0732
View Paper titled, Tension-Tension Fatigue of Copper Thin Films
Open the PDF for Tension-Tension Fatigue of Copper Thin Films in another window
Topics: Copper, Fatigue, Tension, Thin films, Stress, Cycles, Electrons, Fatigue testing, Feedback, Piezoelectric actuators
Proceedings Papers

Heat Transport in the Perpendicular Direction of Superlattices and Periodic Thin-Film Structures

G. Chen
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 13-24, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1331
https://doi.org/10.1115/IMECE1996-1331
View Paper titled, Heat Transport in the Perpendicular Direction of Superlattices and Periodic Thin-Film Structures
Open the PDF for Heat Transport in the Perpendicular Direction of Superlattices and Periodic Thin-Film Structures in another window
Topics: Heat, Superlattices, Thin films, Interfacial thermal resistance, Boundary-value problems, Electromagnetic scattering, First law of thermodynamics, Heat transfer, Integral equations, Mean free path
Proceedings Papers

Application of Diffuse Mismatch Theory to the Prediction of Thermal Boundary Resistance in Thin-Film High-T c Superconductors

Patrick E. Phelan
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 99-105, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1342
https://doi.org/10.1115/IMECE1996-1342
View Paper titled, Application of Diffuse Mismatch Theory to the Prediction of Thermal Boundary Resistance in Thin-Film High-T c Superconductors
Open the PDF for Application of Diffuse Mismatch Theory to the Prediction of Thermal Boundary Resistance in Thin-Film High-T c Superconductors in another window
Topics: Interfacial thermal resistance, Thin films, Temperature, Acoustics, Design, Electromagnetic scattering, High temperature, Phonons, Sensors, Switches
Proceedings Papers

New Methods of Measuring a Key Elastic-Piezoelectric Constant of Thin Films

Fred J. von Preissig, Hong Zeng, Eun Sok Kim
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 307-312, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1366
https://doi.org/10.1115/IMECE1996-1366
View Paper titled, New Methods of Measuring a Key Elastic-Piezoelectric Constant of Thin Films
Open the PDF for New Methods of Measuring a Key Elastic-Piezoelectric Constant of Thin Films in another window
Topics: Thin films, Transducers, Actuators, Composite materials, Sensors
Proceedings Papers

A Technique for Determining the Poisson’s Ratio of Thin Films

Peter Krulevitch
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 319-323, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1368
https://doi.org/10.1115/IMECE1996-1368
View Paper titled, A Technique for Determining the Poisson’s Ratio of Thin Films
Open the PDF for A Technique for Determining the Poisson’s Ratio of Thin Films in another window
Topics: Poisson ratio, Thin films, Plates (structures), Stress, Calibration, Cantilever beams, Errors, Micromachining
Proceedings Papers

Computation of Supersonic Flow for Thin Film Deposition Using Expansion Through a Skimmer

Iain D. Boyd, Gang Chen
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 169-176, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1349
https://doi.org/10.1115/IMECE1996-1349
View Paper titled, Computation of Supersonic Flow for Thin Film Deposition Using Expansion Through a Skimmer
Open the PDF for Computation of Supersonic Flow for Thin Film Deposition Using Expansion Through a Skimmer in another window
Topics: Computation, Supersonic flow, Thin films, Simulation, Monte Carlo methods, Design, Flow (Dynamics), Gasdynamics, Hydrogen, Nonequilibrium flow
Proceedings Papers

Fabrication of Surface-Micromachined Polysilicon Microactuators Using HF Gas-Phase Etching Process

Jong Hyun Lee, Kyung Ho Park, Chun Su Lee, Jong Tae Baek, Chang-Jin Kim, Hyung Joun Yoo
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 373-377, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1377
https://doi.org/10.1115/IMECE1996-1377
View Paper titled, Fabrication of Surface-Micromachined Polysilicon Microactuators Using HF Gas-Phase Etching Process
Open the PDF for Fabrication of Surface-Micromachined Polysilicon Microactuators Using HF Gas-Phase Etching Process in another window
Topics: Etching, Manufacturing, Microactuators, Micromachining, Polysilicon, Chemical etching, Stiction, Stress, Thin films, Vapors
Proceedings Papers

Micromechanical Structures for Fracture Testing of Brittle Thin Films

Peter T. Jones, George C. Johnson, Roger T. Howe
Proc. ASME. IMECE96, Microelectromechanical Systems (MEMS), 325-330, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1369
https://doi.org/10.1115/IMECE1996-1369
View Paper titled, Micromechanical Structures for Fracture Testing of Brittle Thin Films
Open the PDF for Micromechanical Structures for Fracture Testing of Brittle Thin Films in another window
Topics: Brittleness, Fracture (Materials), Fracture (Process), Testing, Thin films, Polysilicon, Cantilever beams, Cantilevers, Design, Displacement
Proceedings Papers

Design and Fabrication of the Fundamental Components Integrated to Realize a Functional Silicon Micromachined Gas Chromatography System

Edward S. Kolesar, Rocky R. Reston
Proc. ASME. IMECE96, Engineering Systems, 11-17, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-0869
https://doi.org/10.1115/IMECE1996-0869
View Paper titled, Design and Fabrication of the Fundamental Components Integrated to Realize a Functional Silicon Micromachined Gas Chromatography System
Open the PDF for Design and Fabrication of the Fundamental Components Integrated to Realize a Functional Silicon Micromachined Gas Chromatography System in another window
Topics: Design, Gas chromatography, Manufacturing, Micromachining, Silicon, Nitrogen, Sensors, Circuits, Ejectors, Borosilicate glasses
Proceedings Papers

Feasibility of Far-Infrared Radiation Modulators Using High- T C Superconductors

Z. M. Zhang
Proc. ASME. IMECE96, Heat Transfer: Volume 1 — Heat Transfer in Microgravity Systems; Radiative Heat Transfer and Radiative Heat Transfer in Low-Temperature Environments; Thermal Contact Conductance and Inverse Problems in Heat Transfer, 187-194, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-0043
https://doi.org/10.1115/IMECE1996-0043
View Paper titled, Feasibility of Far-Infrared Radiation Modulators Using High- T C Superconductors
Open the PDF for Feasibility of Far-Infrared Radiation Modulators Using High- T C Superconductors in another window
Topics: Radiation (Physics), Reflectance, Thin films, Design
Proceedings Papers

Semiconductor Deposition Profile Simulation Using Direct Simulation Monte Carlo Method

Masato Ikegawa, Jun’ichi Kobayashi, Morihisa Maruko
Proc. ASME. IMECE96, Transport Phenomena in Materials Processing and Manufacturing, 235-242, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1051
https://doi.org/10.1115/IMECE1996-1051
View Paper titled, Semiconductor Deposition Profile Simulation Using Direct Simulation Monte Carlo Method
Open the PDF for Semiconductor Deposition Profile Simulation Using Direct Simulation Monte Carlo Method in another window
Topics: Monte Carlo methods, Semiconductors (Materials), Simulation, Boundary-value problems, Pressure, Sputter deposition, Chemical vapor deposition, Collisions (Physics), Dimensions, Gas flow
Proceedings Papers

Flow and Heat Transfer Problems in the Semiconductor Manufacturing Processes

Masato Ikegawa
Proc. ASME. IMECE96, Transport Phenomena in Materials Processing and Manufacturing, 183, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1044
https://doi.org/10.1115/IMECE1996-1044
View Paper titled, Flow and Heat Transfer Problems in the Semiconductor Manufacturing Processes
Open the PDF for Flow and Heat Transfer Problems in the Semiconductor Manufacturing Processes in another window
Topics: Flow (Dynamics), Heat transfer, Integrated circuit fabrication, Semiconductor wafers, Manufacturing, Particulate matter, Chemical reactions, Chemical vapor deposition, Contamination, Etching
Proceedings Papers

Projection Micromachining of Polyimide Thin Films by an Excimer Laser

X. Zhang, C. P. Grigoropoulos, D. J. Krajnovich, A. C. Tam
Proc. ASME. IMECE96, Transport Phenomena in Materials Processing and Manufacturing, 45-54, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1029
https://doi.org/10.1115/IMECE1996-1029
View Paper titled, Projection Micromachining of Polyimide Thin Films by an Excimer Laser
Open the PDF for Projection Micromachining of Polyimide Thin Films by an Excimer Laser in another window
Topics: Excimer lasers, Micromachining, Thin films, Etching, Ablation (Vaporization technology), Lasers, Atomic force microscopy, Fluence (Radiation measurement), Resolution (Optics), Absorption
Proceedings Papers

Nucleation in Thin Film Processing

Kunio Hijikata, Koji Miyazaki, Takayoshi Inoue, Osamu Nakabeppu
Proc. ASME. IMECE96, Transport Phenomena in Materials Processing and Manufacturing, 137-142, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1039
https://doi.org/10.1115/IMECE1996-1039
View Paper titled, Nucleation in Thin Film Processing
Open the PDF for Nucleation in Thin Film Processing in another window
Topics: Nucleation (Physics), Thin films, Copper, Electron microscopes, Film thickness, Perturbation theory, Stability, Surface tension, Vacuum deposition, Waves
Proceedings Papers

On Selective Optical Absorber Film for Rotor of Opto Microengine

Masahiro Ota, Masataka Ishiguro, Moriyoshi Sakamoto
Proc. ASME. IMECE96, Transport Phenomena in Materials Processing and Manufacturing, 193-206, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1046
https://doi.org/10.1115/IMECE1996-1046
View Paper titled, On Selective Optical Absorber Film for Rotor of Opto Microengine
Open the PDF for On Selective Optical Absorber Film for Rotor of Opto Microengine in another window
Topics: Rotors, Germanium, Silicon, Thin films, Aluminum, Reflectance, Borosilicate glasses, Glass, Plates (structures), Actuators
Proceedings Papers

Flat Heads for High-Speed, Contact Tape Recording: Experimental Evaluation and Theoretical Analysis

Sinan Müftü, Hans F. Hinteregger
Proc. ASME. IMECE96, 7th International Symposium on Information Storage and Processing Systems, 39-51, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1066
https://doi.org/10.1115/IMECE1996-1066
View Paper titled, Flat Heads for High-Speed, Contact Tape Recording: Experimental Evaluation and Theoretical Analysis
Open the PDF for Flat Heads for High-Speed, Contact Tape Recording: Experimental Evaluation and Theoretical Analysis in another window
Topics: Air bearings, Corners (Structural elements), Design, Disks, Geometry, Pressure, Suction, Tension, Theoretical analysis, Thin films
Proceedings Papers

The Stability of Flexible Spinning Disks Supported by Incompressible Hydrodynamic Lubrication

Anthony A. Renshaw
Proc. ASME. IMECE96, 7th International Symposium on Information Storage and Processing Systems, 175-184, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-1080
https://doi.org/10.1115/IMECE1996-1080
View Paper titled, The Stability of Flexible Spinning Disks Supported by Incompressible Hydrodynamic Lubrication
Open the PDF for The Stability of Flexible Spinning Disks Supported by Incompressible Hydrodynamic Lubrication in another window
Topics: Lubrication, Rotating disks, Stability, Design, Disks, Rotation, Damping, Thin films, Vibration
Proceedings Papers

An Approach to Characterize Nonlinear Viscoelastic Material Behavior Using Dynamic Mechanical Tests and Analyses

H. J. Golden, T. W. Strganac, R. A. Schapery
Proc. ASME. IMECE96, Aerospace and Materials, 91-110, November 17–22, 1996
Publisher: American Society of Mechanical Engineers
Paper No: IMECE1996-0471
https://doi.org/10.1115/IMECE1996-0471
View Paper titled, An Approach to Characterize Nonlinear Viscoelastic Material Behavior Using Dynamic Mechanical Tests and Analyses
Open the PDF for An Approach to Characterize Nonlinear Viscoelastic Material Behavior Using Dynamic Mechanical Tests and Analyses in another window
Topics: Mechanical testing, Viscoelastic materials, Stress, Thin films
Proceedings Papers

Stochastic Analysis of the Carbon Nanotube Network Interphase in Dry and Pre-Infused Buckypaper

Masoud Yekani Fard, Samuel Perrino, Conor Hedman
Proc. ASME. IMECE2022, Volume 3: Advanced Materials: Design, Processing, Characterization and Applications; Advances in Aerospace Technology, V003T03A044, October 30–November 3, 2022
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2022-95523
https://doi.org/10.1115/IMECE2022-95523
View Paper titled, Stochastic Analysis of the Carbon Nanotube Network Interphase in Dry and Pre-Infused Buckypaper
Open the PDF for Stochastic Analysis of the Carbon Nanotube Network Interphase in Dry and Pre-Infused Buckypaper in another window
Topics: Carbon nanotubes, Polymers, Deformation, Nanoscale phenomena, Atomic force microscopy, Deflection, Fundamental forces (Physics), Materials properties, Microscopy, Nanocomposites
Proceedings Papers

Investigating the Effects of Solvents and Nanocomposites on Tailoring the Elastic Modulus of Piezoelectric Thin Film PVDF-TrFE

Deepak Kunwar, Md Mehadi Hassan, Nathan Jackson
Proc. ASME. IMECE2022, Volume 9: Mechanics of Solids, Structures, and Fluids; Micro- and Nano-Systems Engineering and Packaging; Safety Engineering, Risk, and Reliability Analysis; Research Posters, V009T13A001, October 30–November 3, 2022
Publisher: American Society of Mechanical Engineers
Paper No: IMECE2022-95576
https://doi.org/10.1115/IMECE2022-95576
View Paper titled, Investigating the Effects of Solvents and Nanocomposites on Tailoring the Elastic Modulus of Piezoelectric Thin Film PVDF-TrFE
Open the PDF for Investigating the Effects of Solvents and Nanocomposites on Tailoring the Elastic Modulus of Piezoelectric Thin Film PVDF-TrFE in another window
Topics: Elastic moduli, Nanocomposites, Thin films