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Process design
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Proceedings Papers

Proc. ASME. IMECE98, Micro-Electro-Mechanical Systems (MEMS), 19-25, November 15–20, 1998
Paper No: IMECE1998-1218
Proceedings Papers

Proc. ASME. IMECE99, Manufacturing Science and Engineering, 163-170, November 14–19, 1999
Paper No: IMECE1999-0669