This paper reports an Aerosol-Jet printed micro scale Lead Zirconate Titanate (PZT) energy harvester directly sintered on a low melting point substrate in less than 1 msec using photonic sintering technology. To improve the output signal, d33 piezoelectric mode was employed by patterning silver electrodes as an interdigitated structure on top of a PZT film. The size of the device is 15.5 mm × 13.5 mm × 0.2 mm. Up to 2.4 V was measured at 145 MPa tensile bending stress level in the device after poling at 180 °C for 2 hours with an electric field of 30 kV/cm. Using an oscillating stress (∼2.5 Hz) of approximately 145 MPa, the power as a function of load was determined by connecting the device with various series resistive loads. A maximal power of 0.1 μW was generated when driving into a 10 MΩ load. A PZT energy harvester, for the first time, is demonstrated which has been directly printed and sintered on a low melting temperature flexible substrate without a film transfer processes. This not only dramatically simplifies the fabrication process, but expands the possible substrate materials for PZT energy harvesters.
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ASME 2015 International Mechanical Engineering Congress and Exposition
November 13–19, 2015
Houston, Texas, USA
Conference Sponsors:
- ASME
ISBN:
978-0-7918-5753-3
PROCEEDINGS PAPER
Photonically Sintered PZT Energy Harvester
Jing Ouyang,
Jing Ouyang
Rochester Institute of Technology, Rochester, NY
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Anirudh R. Penmetcha,
Anirudh R. Penmetcha
Rochester Institute of Technology, Rochester, NY
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Denis Cormier,
Denis Cormier
Rochester Institute of Technology, Rochester, NY
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David A. Borkholder
David A. Borkholder
Rochester Institute of Technology, Rochester, NY
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Jing Ouyang
Rochester Institute of Technology, Rochester, NY
Anirudh R. Penmetcha
Rochester Institute of Technology, Rochester, NY
Denis Cormier
Rochester Institute of Technology, Rochester, NY
David A. Borkholder
Rochester Institute of Technology, Rochester, NY
Paper No:
IMECE2015-50769, V010T13A024; 6 pages
Published Online:
March 7, 2016
Citation
Ouyang, J, Penmetcha, AR, Cormier, D, & Borkholder, DA. "Photonically Sintered PZT Energy Harvester." Proceedings of the ASME 2015 International Mechanical Engineering Congress and Exposition. Volume 10: Micro- and Nano-Systems Engineering and Packaging. Houston, Texas, USA. November 13–19, 2015. V010T13A024. ASME. https://doi.org/10.1115/IMECE2015-50769
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