Ratcheted structures with superhydrophobicity have potential to drive motion of liquid drops in microfluidic devices. We report development of a new process to integrate microscale pillars with varied periods of ratchets from sub-micrometer to 1.5 mm in SU-8. For the fabrication, an hierarchical mixed process of thermal imprint lithography and optical UV-lithography was employed. Use of Ni ratchets as stamps and a hydrophobic silane coating on the stamp surfaces significantly improved imprinting performance into SU-8. We have successfully demonstrated fabrication of ratcheted micropillars as well as submicrometer ratchets integrated into micropillars. In addition, we will discuss optimization of the SU-8 imprinting process and the air gap compensation for photolithography of ratcheted SU-8 layers, which are essential for the fabrication.
Skip Nav Destination
ASME 2008 International Mechanical Engineering Congress and Exposition
October 31–November 6, 2008
Boston, Massachusetts, USA
Conference Sponsors:
- ASME
ISBN:
978-0-7918-4874-6
PROCEEDINGS PAPER
Fabrication of 3-D Superhydrophobic Micro-Ratchets via Combined Thermal Imprint Lithography and Photolithography
Jeong Tae Ok,
Jeong Tae Ok
Louisiana State University, Baton Rouge, LA
Search for other works by this author on:
Eugene Lopez-On˜a,
Eugene Lopez-On˜a
Louisiana State University, Baton Rouge, LA
Search for other works by this author on:
Daniel Sang-Won Park,
Daniel Sang-Won Park
Louisiana State University, Baton Rouge, LA
Search for other works by this author on:
Harris Wong,
Harris Wong
Louisiana State University, Baton Rouge, LA
Search for other works by this author on:
Sunggook Park
Sunggook Park
Louisiana State University, Baton Rouge, LA
Search for other works by this author on:
Jeong Tae Ok
Louisiana State University, Baton Rouge, LA
Eugene Lopez-On˜a
Louisiana State University, Baton Rouge, LA
Daniel Sang-Won Park
Louisiana State University, Baton Rouge, LA
Harris Wong
Louisiana State University, Baton Rouge, LA
Sunggook Park
Louisiana State University, Baton Rouge, LA
Paper No:
IMECE2008-67880, pp. 785-790; 6 pages
Published Online:
August 26, 2009
Citation
Ok, JT, Lopez-On˜a, E, Park, DS, Wong, H, & Park, S. "Fabrication of 3-D Superhydrophobic Micro-Ratchets via Combined Thermal Imprint Lithography and Photolithography." Proceedings of the ASME 2008 International Mechanical Engineering Congress and Exposition. Volume 13: Nano-Manufacturing Technology; and Micro and Nano Systems, Parts A and B. Boston, Massachusetts, USA. October 31–November 6, 2008. pp. 785-790. ASME. https://doi.org/10.1115/IMECE2008-67880
Download citation file:
15
Views
Related Proceedings Papers
Related Articles
Development of Nanoporous Ultrathin Membranes For Implantable Drug Delivery
J. Med. Devices (June,2008)
Fabrication and Bioconjugation of Micro- and Nanoscale Structures Intended for Cancer-Specific Antigen Detection
J. Electron. Packag (June,2009)
A Submicron Multiaxis Positioning Stage for Micro- and Nanoscale Manufacturing Processes
J. Manuf. Sci. Eng (June,2008)
Related Chapters
Multiscale Methods for Lightweight Structure and Material Characterization
Advanced Multifunctional Lightweight Aerostructures: Design, Development, and Implementation
Fabrication of Micro and Nano Pillar Arrays by Dielectrophoresis Force Driven Reverse-Imprint
International Conference on Mechanical and Electrical Technology, 3rd, (ICMET-China 2011), Volumes 1–3
Gas-Fluidized Beds
Two-Phase Heat Transfer