Abstract

This paper presents an electromagnetic microactuator using the copper coil, electroplated on a p+-silicon diaphragm. The microactuator generates a vertical motion of the diaphragm using the radial components of the magnetic field on the coil plane. In order to guide and concentrate the magnetic field in the radial direction, we propose a new microactuator structure with twin magnets. The microactuator shows values of resonant frequency and quality factor in the ranges of 10.51±0.22kHz and 46.6±3.3, respectively. The twin magnet microactuator generates the maximum peak-to-peak amplitude of 4.4μm for the AC rms current of 26.8mA. showing 2.4 times larger amplitude than the single magnet microactuator.

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