Abstract

We present the design, fabrication and characterization of multi-layer piezoelectric micromirror actuators for minimizing the initial deflection without loosing the actuation performance. We modified the initial designs in order to minimize the initial deflection of the multi-layer device by changing the residual stress and thickness ratio of selected layers, thereby reducing the residual stress gradient across the multi-layered thin film materials. The modified designs are fabricated by surface-micromachining process. Experimental results indicate that over 70% reduction of the initial deflection has been achieved by the residual stress and thickness control of the multi-layer piezoelectric micromirror devices.

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