Abstract
This paper deals with the amplitude-frequency response of primary resonance of electrostatically actuated MEMS circular plates. The partial differential equation of motion describing the motion of the membrane is nondimensionalized. The dimensionless equation includes the dimensionless parameters describing the effects of electrostatic, Casimir, van der Waals, and damping forces. The AC frequency used for actuation is near half of the natural frequency of the membrane. Two methods of investigation are used. The first is the method of multiple scales (MMS), and the second is the reduced order model (ROM). The results of this work show that the Casimir and van der Waals parameters enhance the softening effect of the amplitude-frequency response of the membrane, while the increase of the voltage parameter increases the escape band of the response.
