Fast Fourier Transform (FFT) calculates integer harmonic components, but ignores other frequency components such as non-integer harmonics and non-harmonics. In a practical sampling problem, the length of a sampled signal is finite and the sampling time is minimized. Therefore, it is necessary for interpolation to improve the accuracy of frequency analysis considering 1/m harmonic components and zero-padding (ZP) technique. The proposed method was applied to a 3D RF profile measurement system and the resolution was improved to 1/m.

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