Study on Nitridation of Silicon Added With Amorphous Silicon Nitride

The direct nitridation process of silicon added with amorphous silicon nitride powder at atmospheric pressure was investigated and the product was analyzed by XRD and SEM. Based on the relationship between the conversion ratio of silicon and the reaction time at different temperatures, a physical and mathematical model was derived to describe the nitridation process of silicon particles. The results showed that the conversion ratio of silicon increased rapidly at the early stage of reaction. And the reaction would be accelerated by reducing the size of silicon particle and increasing the pressure of N₂. At the range of experimental temperature, the conversion ratio of silicon increases with improving temperature.