We present experimental measurements of the mechanical properties of nanoscale-thick materials using a recently developed free-standing membrane test. Freestanding membranes of gold and a nano-porous silicate were centrally deflected using a spherical indenter attached to a microfabricated fixed-fixed beam device. Experiments of this type allow us to extract mechanical properties of the thin films without the complicating effects of the substrate, enabling accurate study of length scale effects. These experiments differ from previous work by testing freestanding films and by including the finite contact size of the indenter tip.
Measurements of the Mechanical Properties of Freestanding Nanoscale Membranes
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Leseman, ZC, Jeong, H, Mackin, TJ, Masel, RI, & Begley, M. "Measurements of the Mechanical Properties of Freestanding Nanoscale Membranes." Proceedings of the ASME 2006 International Mechanical Engineering Congress and Exposition. Microelectromechanical Systems. Chicago, Illinois, USA. November 5–10, 2006. pp. 323-325. ASME. https://doi.org/10.1115/IMECE2006-14463
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