We present experimental measurements of the mechanical properties of nanoscale-thick materials using a recently developed free-standing membrane test. Freestanding membranes of gold and a nano-porous silicate were centrally deflected using a spherical indenter attached to a microfabricated fixed-fixed beam device. Experiments of this type allow us to extract mechanical properties of the thin films without the complicating effects of the substrate, enabling accurate study of length scale effects. These experiments differ from previous work by testing freestanding films and by including the finite contact size of the indenter tip.

1.
Haque
M. A.
and
Saif
M. T. A.
, “
Application of MEMS force sensors for in-situ mechanical characterization of nano-scale thin films in SEM and TEM
,”
Sensors and Actuators A
, vol.
97–98
, pp.
239
245
,
2002
.
2.
Weihs
T. P.
,
Hong
S.
,
Bravman
J. C.
, and
Nix
W. D.
, “
Mechnical detection of cantilevered microbeams
,”
Journal of Materials Research
, vol.
3
, no.
5
, pp.
931
942
, September-October
1988
.
3.
Small
M. K.
and
Nix
W. D.
,
Analysis of the accuracy of the bulge test in determining the mechanical properties of thin films
,”
Journal of Materials Research
, vol.
7
, pp.
1553
1563
,
1990
.
4.
Vlassak
J. J.
and
Nix
W. D.
, “
A new bulge test technique for the determination of Young’s modulus and Poisson’s ratio of thin films
,”
Journal of Materials Research
, vol.
7
, pp.
3242
3249
,
1992
.
5.
Z. C. Leseman and T. J. Mackin, “Indentation Testing of Axisymmetric Freestanding Nanofilms Using a MEMS Load Cell,” Sensors and Actuators A, in press.
6.
Z.C. Leseman, Z. Sheikh, T.J. Mackin, and M. Begley, “Mechanical testing of freestanding nano-films using a novel finite diameter tip MEMS-based testing machine,” in: 2005 ASME International Mechanical Engineering Congress and Exposition, no. 80987, 2005.
7.
Begley
M. R.
,
Mackin
T. J.
, “
Spherical indentation of freestanding circular 303thin films in the membrane regime
”,
J. Mech. Phys. Solids
, vol.
52
, no.
9
, pp.
2005
2023
,
2004
.
8.
Z. C. Leseman and T. J. Mackin, “A method for the calibration of MEMS Load Cells,” to be submitted.
9.
Alcantar
N. A.
,
Park
C.
,
Pan
J. M.
, and
Israelachvili
J. N.
, “
Adhesion and coalescence of ductile metal surfaces and nanoparticles
,”
Acta Materialia
, vol.
51
, pp.
31, 47
31, 47
,
2003
.
10.
A. Boudaoud and S. Chaieb, “Singluar thin viscous sheet,” Physical Review E, vol. 64, no. 050601(R), 2001.
11.
H. K. Jeong, Z. C. Leseman, R. I. Masel, “A novel process of fabrication for nano-porous silicates and their characterization,” to be submitted.
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