Planar defects such as cracks are rarely normal to the loading direction. To investigate the case of arbitrarily oriented cracks mixed mode I/II fracture experiments were conducted on amorphous diamond-like carbon (ta-C) thin films. The mixed mode I/II loading at the crack tip was obtained using oblique edge pre-cracks in uniform gage finite width tensile specimens. The pre-cracks were generated using microindentation in 1μm thick micro-tensile specimens. Uniaxial tensile tests were performed to measure the applied far-field stress at failure and a numerical solution was used to extract the stress intensity factor values. The results were compared against the maximum tensile stress (MTS) and maximum energy release rate (MERR) criteria for mixed mode fracture and the data showed good agreement.
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ASME 2006 International Mechanical Engineering Congress and
Exposition
November 5–10, 2006
Chicago, Illinois, USA
Conference Sponsors:
- Microelectromechanical Systems Division
ISBN:
0-7918-4775-6
PROCEEDINGS PAPER
Mixed Mode Fracture in Brittle Materials for MEMS
Krishna Jonnalagadda,
Krishna Jonnalagadda
University of Illinois at Urbana-Champaign
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Ioannis Chasiotis,
Ioannis Chasiotis
University of Illinois at Urbana-Champaign
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Thomas Friedmann
Thomas Friedmann
Sandia National Laboratories
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Krishna Jonnalagadda
University of Illinois at Urbana-Champaign
Ioannis Chasiotis
University of Illinois at Urbana-Champaign
Thomas Friedmann
Sandia National Laboratories
Paper No:
IMECE2006-13832, pp. 3-4; 2 pages
Published Online:
December 14, 2007
Citation
Jonnalagadda, K, Chasiotis, I, & Friedmann, T. "Mixed Mode Fracture in Brittle Materials for MEMS." Proceedings of the ASME 2006 International Mechanical Engineering Congress and Exposition. Microelectromechanical Systems. Chicago, Illinois, USA. November 5–10, 2006. pp. 3-4. ASME. https://doi.org/10.1115/IMECE2006-13832
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