This work details the effect of top membrane compliance on the performance of a MEMS based micro-heat engine and integrated thermal switch at operating speeds of 20, 40, and 100Hz and heat inputs of up to 60mJ per cycle. The engine consists of two flexible membranes encapsulating a volume of saturated working fluid. A thermal switch is used to intermittently reject heat from the engine to a constant temperature cooling sink. Mechanical work output is measured based on the engine's top membrane deflection and internal operating pressure. Three top membranes are considered; a 2micron thick silicon membrane, a 300nm thick silicon-nitride membrane, and a 3micron thick corrugated silicon membrane. The engine is shown to produce 1.0mW of mechanical power when operated at 100Hz.
A MEMS-Based Micro Heat Engine With Integrated Thermal Switch
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Weiss, LW, Cho, JH, Morris, DJ, Bahr, DF, Richards, CD, & Richards, RF. "A MEMS-Based Micro Heat Engine With Integrated Thermal Switch." Proceedings of the ASME 2006 International Mechanical Engineering Congress and Exposition. Advanced Energy Systems. Chicago, Illinois, USA. November 5–10, 2006. pp. 25-29. ASME. https://doi.org/10.1115/IMECE2006-15042
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